12/13/2010	10:14:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/13/2010	10:14:08 AM	Recipe started at 10:14 AM
12/13/2010	10:14:08 AM	Helium valve closed
12/13/2010	10:14:08 AM	H2 valve closed
12/13/2010	10:14:08 AM	BCl3 valve closed
12/13/2010	10:14:08 AM	PH3 valve closed
12/13/2010	10:14:08 AM	SiCl4 pre valve closed
12/13/2010	10:14:08 AM	SiCl4 post valve closed
12/13/2010	10:14:08 AM	Main Vac valve closed
12/13/2010	10:14:08 AM	Bypass valve closed
12/13/2010	10:14:08 AM	Bubbler valve closed
12/13/2010	10:14:08 AM	Helium MFC set to  0.000000
12/13/2010	10:14:08 AM	H2 MFC set to  0.000000
12/13/2010	10:14:08 AM	BCl3 MFC set to  0.000000
12/13/2010	10:14:08 AM	PHl3 MFC set to  0.000000
12/13/2010	10:14:08 AM	SiCl4 MFC set to  0.000000
12/13/2010	10:14:08 AM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:14:08 AM	Tube furnace set to 0
12/13/2010	10:14:08 AM	Run finished at 10:14 AM
12/13/2010	10:14:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/13/2010	10:18:50 AM	Bypass valve opened
12/13/2010	10:18:51 AM	Main Vac valve opened
12/13/2010	11:21:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/13/2010	11:21:42 AM	Recipe started at 11:21 AM
12/13/2010	11:21:42 AM	H2 valve closed
12/13/2010	11:21:42 AM	BCl3 valve closed
12/13/2010	11:21:42 AM	PH3 valve closed
12/13/2010	11:21:42 AM	SiCl4 pre valve closed
12/13/2010	11:21:42 AM	SiCl4 post valve closed
12/13/2010	11:21:42 AM	Main Vac valve closed
12/13/2010	11:21:42 AM	Bypass valve closed
12/13/2010	11:21:42 AM	Bubbler valve closed
12/13/2010	11:21:42 AM	Helium valve opened
12/13/2010	11:21:42 AM	Helium MFC set to  500.000000
12/13/2010	11:21:42 AM	H2 MFC set to  0.000000
12/13/2010	11:21:42 AM	BCl3 MFC set to  0.000000
12/13/2010	11:21:42 AM	PHl3 MFC set to  0.000000
12/13/2010	11:21:42 AM	SiCl4 MFC set to  0.000000
12/13/2010	11:21:42 AM	Bypass solenoid MFC set to  0.000000
12/13/2010	11:21:42 AM	Tube furnace set to 0
12/13/2010	11:23:02 AM	Helium valve closed
12/13/2010	11:23:02 AM	H2 valve closed
12/13/2010	11:23:02 AM	BCl3 valve closed
12/13/2010	11:23:02 AM	PH3 valve closed
12/13/2010	11:23:02 AM	SiCl4 pre valve closed
12/13/2010	11:23:02 AM	SiCl4 post valve closed
12/13/2010	11:23:02 AM	Main Vac valve closed
12/13/2010	11:23:02 AM	Bypass valve closed
12/13/2010	11:23:02 AM	Bubbler valve closed
12/13/2010	11:23:02 AM	Helium MFC set to  0.000000
12/13/2010	11:23:02 AM	H2 MFC set to  0.000000
12/13/2010	11:23:02 AM	BCl3 MFC set to  0.000000
12/13/2010	11:23:02 AM	PHl3 MFC set to  0.000000
12/13/2010	11:23:02 AM	SiCl4 MFC set to  0.000000
12/13/2010	11:23:02 AM	Bypass solenoid MFC set to  0.000000
12/13/2010	11:23:02 AM	Tube furnace set to 0
12/13/2010	11:23:03 AM	Run finished at 11:23 AM
12/13/2010	11:23:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/13/2010	11:25:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/13/2010	11:25:50 AM	Recipe started at 11:25 AM
12/13/2010	11:25:50 AM	Helium valve closed
12/13/2010	11:25:50 AM	H2 valve closed
12/13/2010	11:25:50 AM	BCl3 valve closed
12/13/2010	11:25:50 AM	PH3 valve closed
12/13/2010	11:25:50 AM	SiCl4 pre valve closed
12/13/2010	11:25:50 AM	SiCl4 post valve closed
12/13/2010	11:25:50 AM	Main Vac valve closed
12/13/2010	11:25:50 AM	Bubbler valve closed
12/13/2010	11:25:50 AM	Bypass valve opened
12/13/2010	11:25:50 AM	Helium MFC set to  0.000000
12/13/2010	11:25:50 AM	H2 MFC set to  0.000000
12/13/2010	11:25:50 AM	BCl3 MFC set to  0.000000
12/13/2010	11:25:50 AM	PHl3 MFC set to  0.000000
12/13/2010	11:25:50 AM	SiCl4 MFC set to  0.000000
12/13/2010	11:25:50 AM	Bypass solenoid MFC set to  0.000000
12/13/2010	11:25:50 AM	Tube furnace set to 0
12/13/2010	11:25:52 AM	Run aborted at 11:25 AM
12/13/2010	11:25:52 AM	Helium valve closed
12/13/2010	11:25:52 AM	H2 valve closed
12/13/2010	11:25:52 AM	BCl3 valve closed
12/13/2010	11:25:52 AM	PH3 valve closed
12/13/2010	11:25:52 AM	SiCl4 pre valve closed
12/13/2010	11:25:52 AM	SiCl4 post valve closed
12/13/2010	11:25:52 AM	Bypass valve closed
12/13/2010	11:25:52 AM	Main Vac valve closed
12/13/2010	11:25:52 AM	Bubbler valve closed
12/13/2010	11:25:52 AM	Helium MFC set to  0.000000
12/13/2010	11:25:52 AM	H2 MFC set to  0.000000
12/13/2010	11:25:52 AM	BCl3 MFC set to  0.000000
12/13/2010	11:25:52 AM	PHl3 MFC set to  0.000000
12/13/2010	11:25:52 AM	SiCl4 MFC set to  0.000000
12/13/2010	11:25:53 AM	Tube furnace set to 0
12/13/2010	11:25:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/13/2010	11:26:01 AM	Bypass valve opened
12/13/2010	11:26:11 AM	Bypass valve closed
12/13/2010	11:26:17 AM	Bypass valve opened
12/13/2010	11:26:25 AM	Bypass valve closed
12/13/2010	11:26:26 AM	Main Vac valve opened
12/13/2010	11:26:36 AM	Main Vac valve closed
12/13/2010	11:26:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/13/2010	11:26:40 AM	Recipe started at 11:26 AM
12/13/2010	11:26:40 AM	H2 valve closed
12/13/2010	11:26:40 AM	BCl3 valve closed
12/13/2010	11:26:40 AM	PH3 valve closed
12/13/2010	11:26:40 AM	SiCl4 pre valve closed
12/13/2010	11:26:40 AM	SiCl4 post valve closed
12/13/2010	11:26:40 AM	Main Vac valve closed
12/13/2010	11:26:40 AM	Bypass valve closed
12/13/2010	11:26:40 AM	Bubbler valve closed
12/13/2010	11:26:40 AM	Helium valve opened
12/13/2010	11:26:40 AM	Helium MFC set to  500.000000
12/13/2010	11:26:40 AM	H2 MFC set to  0.000000
12/13/2010	11:26:40 AM	BCl3 MFC set to  0.000000
12/13/2010	11:26:40 AM	PHl3 MFC set to  0.000000
12/13/2010	11:26:40 AM	SiCl4 MFC set to  0.000000
12/13/2010	11:26:40 AM	Bypass solenoid MFC set to  0.000000
12/13/2010	11:26:40 AM	Tube furnace set to 0
12/13/2010	11:27:10 AM	Helium valve closed
12/13/2010	11:27:10 AM	H2 valve closed
12/13/2010	11:27:10 AM	BCl3 valve closed
12/13/2010	11:27:10 AM	PH3 valve closed
12/13/2010	11:27:10 AM	SiCl4 pre valve closed
12/13/2010	11:27:10 AM	SiCl4 post valve closed
12/13/2010	11:27:10 AM	Main Vac valve closed
12/13/2010	11:27:10 AM	Bypass valve closed
12/13/2010	11:27:10 AM	Bubbler valve closed
12/13/2010	11:27:10 AM	Helium MFC set to  0.000000
12/13/2010	11:27:10 AM	H2 MFC set to  0.000000
12/13/2010	11:27:10 AM	BCl3 MFC set to  0.000000
12/13/2010	11:27:10 AM	PHl3 MFC set to  0.000000
12/13/2010	11:27:10 AM	SiCl4 MFC set to  0.000000
12/13/2010	11:27:10 AM	Bypass solenoid MFC set to  0.000000
12/13/2010	11:27:10 AM	Tube furnace set to 0
12/13/2010	11:27:10 AM	Run finished at 11:27 AM
12/13/2010	11:27:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/13/2010	11:27:13 AM	Main Vac valve opened
12/13/2010	11:27:22 AM	Main Vac valve closed
12/13/2010	11:27:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/13/2010	11:27:24 AM	Recipe started at 11:27 AM
12/13/2010	11:27:24 AM	H2 valve closed
12/13/2010	11:27:24 AM	BCl3 valve closed
12/13/2010	11:27:24 AM	PH3 valve closed
12/13/2010	11:27:24 AM	SiCl4 pre valve closed
12/13/2010	11:27:24 AM	SiCl4 post valve closed
12/13/2010	11:27:24 AM	Main Vac valve closed
12/13/2010	11:27:24 AM	Bypass valve closed
12/13/2010	11:27:24 AM	Bubbler valve closed
12/13/2010	11:27:24 AM	Helium valve opened
12/13/2010	11:27:24 AM	Helium MFC set to  500.000000
12/13/2010	11:27:24 AM	H2 MFC set to  0.000000
12/13/2010	11:27:24 AM	BCl3 MFC set to  0.000000
12/13/2010	11:27:24 AM	PHl3 MFC set to  0.000000
12/13/2010	11:27:24 AM	SiCl4 MFC set to  0.000000
12/13/2010	11:27:24 AM	Bypass solenoid MFC set to  0.000000
12/13/2010	11:27:24 AM	Tube furnace set to 0
12/13/2010	11:27:59 AM	Helium valve closed
12/13/2010	11:27:59 AM	H2 valve closed
12/13/2010	11:27:59 AM	BCl3 valve closed
12/13/2010	11:27:59 AM	PH3 valve closed
12/13/2010	11:27:59 AM	SiCl4 pre valve closed
12/13/2010	11:27:59 AM	SiCl4 post valve closed
12/13/2010	11:27:59 AM	Main Vac valve closed
12/13/2010	11:27:59 AM	Bypass valve closed
12/13/2010	11:27:59 AM	Bubbler valve closed
12/13/2010	11:27:59 AM	Helium MFC set to  0.000000
12/13/2010	11:27:59 AM	H2 MFC set to  0.000000
12/13/2010	11:27:59 AM	BCl3 MFC set to  0.000000
12/13/2010	11:27:59 AM	PHl3 MFC set to  0.000000
12/13/2010	11:27:59 AM	SiCl4 MFC set to  0.000000
12/13/2010	11:27:59 AM	Bypass solenoid MFC set to  0.000000
12/13/2010	11:27:59 AM	Tube furnace set to 0
12/13/2010	11:27:59 AM	Run finished at 11:27 AM
12/13/2010	11:27:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/13/2010	11:28:30 AM	Main Vac valve opened
12/13/2010	11:28:36 AM	Main Vac valve closed
12/13/2010	11:32:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/13/2010	11:32:18 AM	Recipe started at 11:32 AM
12/13/2010	11:32:18 AM	H2 valve closed
12/13/2010	11:32:18 AM	BCl3 valve closed
12/13/2010	11:32:18 AM	PH3 valve closed
12/13/2010	11:32:18 AM	SiCl4 pre valve closed
12/13/2010	11:32:18 AM	SiCl4 post valve closed
12/13/2010	11:32:18 AM	Main Vac valve closed
12/13/2010	11:32:18 AM	Bypass valve closed
12/13/2010	11:32:18 AM	Bubbler valve closed
12/13/2010	11:32:18 AM	Helium valve opened
12/13/2010	11:32:18 AM	Helium MFC set to  500.000000
12/13/2010	11:32:18 AM	H2 MFC set to  0.000000
12/13/2010	11:32:18 AM	BCl3 MFC set to  0.000000
12/13/2010	11:32:18 AM	PHl3 MFC set to  0.000000
12/13/2010	11:32:18 AM	SiCl4 MFC set to  0.000000
12/13/2010	11:32:18 AM	Bypass solenoid MFC set to  0.000000
12/13/2010	11:32:18 AM	Tube furnace set to 0
12/13/2010	11:33:02 AM	Helium valve closed
12/13/2010	11:33:02 AM	H2 valve closed
12/13/2010	11:33:02 AM	BCl3 valve closed
12/13/2010	11:33:02 AM	PH3 valve closed
12/13/2010	11:33:02 AM	SiCl4 pre valve closed
12/13/2010	11:33:02 AM	SiCl4 post valve closed
12/13/2010	11:33:02 AM	Main Vac valve closed
12/13/2010	11:33:02 AM	Bypass valve closed
12/13/2010	11:33:02 AM	Bubbler valve closed
12/13/2010	11:33:02 AM	Helium MFC set to  0.000000
12/13/2010	11:33:02 AM	H2 MFC set to  0.000000
12/13/2010	11:33:02 AM	BCl3 MFC set to  0.000000
12/13/2010	11:33:02 AM	PHl3 MFC set to  0.000000
12/13/2010	11:33:02 AM	SiCl4 MFC set to  0.000000
12/13/2010	11:33:02 AM	Bypass solenoid MFC set to  0.000000
12/13/2010	11:33:02 AM	Tube furnace set to 0
12/13/2010	11:33:03 AM	Run finished at 11:33 AM
12/13/2010	11:33:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/13/2010	11:33:05 AM	Main Vac valve opened
12/13/2010	11:33:14 AM	Main Vac valve closed
12/13/2010	11:33:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/13/2010	11:33:17 AM	Recipe started at 11:33 AM
12/13/2010	11:33:17 AM	H2 valve closed
12/13/2010	11:33:17 AM	BCl3 valve closed
12/13/2010	11:33:17 AM	PH3 valve closed
12/13/2010	11:33:17 AM	SiCl4 pre valve closed
12/13/2010	11:33:17 AM	SiCl4 post valve closed
12/13/2010	11:33:17 AM	Main Vac valve closed
12/13/2010	11:33:17 AM	Bypass valve closed
12/13/2010	11:33:17 AM	Bubbler valve closed
12/13/2010	11:33:17 AM	Helium valve opened
12/13/2010	11:33:17 AM	Helium MFC set to  500.000000
12/13/2010	11:33:17 AM	H2 MFC set to  0.000000
12/13/2010	11:33:17 AM	BCl3 MFC set to  0.000000
12/13/2010	11:33:17 AM	PHl3 MFC set to  0.000000
12/13/2010	11:33:17 AM	SiCl4 MFC set to  0.000000
12/13/2010	11:33:17 AM	Bypass solenoid MFC set to  0.000000
12/13/2010	11:33:17 AM	Tube furnace set to 0
12/13/2010	11:34:37 AM	Helium valve closed
12/13/2010	11:34:37 AM	H2 valve closed
12/13/2010	11:34:37 AM	BCl3 valve closed
12/13/2010	11:34:37 AM	PH3 valve closed
12/13/2010	11:34:37 AM	SiCl4 pre valve closed
12/13/2010	11:34:37 AM	SiCl4 post valve closed
12/13/2010	11:34:37 AM	Main Vac valve closed
12/13/2010	11:34:37 AM	Bypass valve closed
12/13/2010	11:34:37 AM	Bubbler valve closed
12/13/2010	11:34:37 AM	Helium MFC set to  0.000000
12/13/2010	11:34:37 AM	H2 MFC set to  0.000000
12/13/2010	11:34:37 AM	BCl3 MFC set to  0.000000
12/13/2010	11:34:37 AM	PHl3 MFC set to  0.000000
12/13/2010	11:34:37 AM	SiCl4 MFC set to  0.000000
12/13/2010	11:34:37 AM	Bypass solenoid MFC set to  0.000000
12/13/2010	11:34:38 AM	Tube furnace set to 0
12/13/2010	11:34:38 AM	Run finished at 11:34 AM
12/13/2010	11:34:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/13/2010	11:39:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/13/2010	11:39:40 AM	Recipe started at 11:39 AM
12/13/2010	11:39:40 AM	Helium valve closed
12/13/2010	11:39:40 AM	H2 valve closed
12/13/2010	11:39:40 AM	BCl3 valve closed
12/13/2010	11:39:40 AM	PH3 valve closed
12/13/2010	11:39:40 AM	SiCl4 pre valve closed
12/13/2010	11:39:40 AM	SiCl4 post valve closed
12/13/2010	11:39:40 AM	Main Vac valve closed
12/13/2010	11:39:40 AM	Bubbler valve closed
12/13/2010	11:39:40 AM	Bypass valve opened
12/13/2010	11:39:40 AM	Helium MFC set to  0.000000
12/13/2010	11:39:40 AM	H2 MFC set to  0.000000
12/13/2010	11:39:40 AM	BCl3 MFC set to  0.000000
12/13/2010	11:39:40 AM	PHl3 MFC set to  0.000000
12/13/2010	11:39:40 AM	SiCl4 MFC set to  0.000000
12/13/2010	11:39:40 AM	Bypass solenoid MFC set to  0.000000
12/13/2010	11:39:40 AM	Tube furnace set to 0
12/13/2010	11:40:34 AM	Helium valve closed
12/13/2010	11:40:34 AM	H2 valve closed
12/13/2010	11:40:34 AM	BCl3 valve closed
12/13/2010	11:40:34 AM	PH3 valve closed
12/13/2010	11:40:34 AM	SiCl4 pre valve closed
12/13/2010	11:40:34 AM	SiCl4 post valve closed
12/13/2010	11:40:34 AM	Bubbler valve closed
12/13/2010	11:40:34 AM	Main Vac valve opened
12/13/2010	11:40:34 AM	Bypass valve opened
12/13/2010	11:40:34 AM	Helium MFC set to  0.000000
12/13/2010	11:40:34 AM	H2 MFC set to  0.000000
12/13/2010	11:40:34 AM	BCl3 MFC set to  0.000000
12/13/2010	11:40:34 AM	PHl3 MFC set to  0.000000
12/13/2010	11:40:34 AM	SiCl4 MFC set to  0.000000
12/13/2010	11:40:34 AM	Bypass solenoid MFC set to  0.000000
12/13/2010	11:40:34 AM	Tube furnace set to 0
12/13/2010	11:40:34 AM	Run finished at 11:40 AM
12/13/2010	11:40:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/13/2010	11:44:17 AM	Main Vac valve closed
12/13/2010	11:44:19 AM	Bypass valve closed
12/13/2010	11:44:34 AM	Bypass valve opened
12/13/2010	11:44:35 AM	Main Vac valve opened
12/13/2010	11:44:48 AM	Helium MFC set to  200.000000
12/13/2010	11:44:49 AM	Helium valve opened
12/13/2010	11:46:19 AM	Helium MFC set to  0.000000
12/13/2010	11:46:19 AM	Helium valve closed
12/13/2010	11:49:45 AM	Recipe started at 11:49 AM
12/13/2010	11:49:45 AM	Helium valve closed
12/13/2010	11:49:45 AM	BCl3 valve closed
12/13/2010	11:49:45 AM	PH3 valve closed
12/13/2010	11:49:45 AM	SiCl4 pre valve closed
12/13/2010	11:49:45 AM	SiCl4 post valve closed
12/13/2010	11:49:45 AM	Main Vac valve closed
12/13/2010	11:49:45 AM	Bypass valve closed
12/13/2010	11:49:45 AM	Bubbler valve closed
12/13/2010	11:49:45 AM	H2 valve opened
12/13/2010	11:49:45 AM	Helium MFC set to  0.000000
12/13/2010	11:49:45 AM	H2 MFC set to  500.000000
12/13/2010	11:49:45 AM	BCl3 MFC set to  0.000000
12/13/2010	11:49:45 AM	PHl3 MFC set to  0.000000
12/13/2010	11:49:45 AM	SiCl4 MFC set to  0.000000
12/13/2010	11:49:45 AM	Bypass solenoid MFC set to  0.000000
12/13/2010	11:49:45 AM	Tube furnace set to 200
12/13/2010	11:51:06 AM	Helium valve closed
12/13/2010	11:51:06 AM	BCl3 valve closed
12/13/2010	11:51:06 AM	PH3 valve closed
12/13/2010	11:51:06 AM	SiCl4 pre valve closed
12/13/2010	11:51:06 AM	SiCl4 post valve closed
12/13/2010	11:51:06 AM	Main Vac valve closed
12/13/2010	11:51:06 AM	Bypass valve closed
12/13/2010	11:51:06 AM	H2 valve opened
12/13/2010	11:51:07 AM	Bubbler valve opened
12/13/2010	11:51:07 AM	Helium MFC set to  0.000000
12/13/2010	11:51:07 AM	H2 MFC set to  500.000000
12/13/2010	11:51:07 AM	BCl3 MFC set to  0.000000
12/13/2010	11:51:07 AM	PHl3 MFC set to  0.000000
12/13/2010	11:51:07 AM	SiCl4 MFC set to  0.000000
12/13/2010	11:51:07 AM	Bypass solenoid MFC set to  0.000000
12/13/2010	11:51:07 AM	Tube furnace set to 1050
12/13/2010	12:01:24 PM	Helium valve closed
12/13/2010	12:01:24 PM	BCl3 valve closed
12/13/2010	12:01:24 PM	PH3 valve closed
12/13/2010	12:01:24 PM	Main Vac valve closed
12/13/2010	12:01:24 PM	Bypass valve closed
12/13/2010	12:01:24 PM	H2 valve opened
12/13/2010	12:01:24 PM	SiCl4 pre valve opened
12/13/2010	12:01:24 PM	SiCl4 post valve opened
12/13/2010	12:01:24 PM	Bubbler valve opened
12/13/2010	12:01:24 PM	Helium MFC set to  0.000000
12/13/2010	12:01:24 PM	H2 MFC set to  500.000000
12/13/2010	12:01:24 PM	BCl3 MFC set to  0.000000
12/13/2010	12:01:24 PM	PHl3 MFC set to  0.000000
12/13/2010	12:01:24 PM	SiCl4 MFC set to  50.000000
12/13/2010	12:01:24 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	12:01:25 PM	Tube furnace set to 1050
12/13/2010	12:01:29 PM	H2 valve closed
12/13/2010	12:01:29 PM	BCl3 valve closed
12/13/2010	12:01:29 PM	PH3 valve closed
12/13/2010	12:01:29 PM	SiCl4 pre valve closed
12/13/2010	12:01:29 PM	SiCl4 post valve closed
12/13/2010	12:01:29 PM	Main Vac valve closed
12/13/2010	12:01:29 PM	Bypass valve closed
12/13/2010	12:01:29 PM	Helium valve opened
12/13/2010	12:01:29 PM	Bubbler valve opened
12/13/2010	12:01:29 PM	Helium MFC set to  500.000000
12/13/2010	12:01:29 PM	H2 MFC set to  0.000000
12/13/2010	12:01:29 PM	BCl3 MFC set to  0.000000
12/13/2010	12:01:29 PM	PHl3 MFC set to  0.000000
12/13/2010	12:01:29 PM	SiCl4 MFC set to  0.000000
12/13/2010	12:01:29 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	12:01:29 PM	Tube furnace set to 0
12/13/2010	12:01:48 PM	Helium valve closed
12/13/2010	12:01:48 PM	H2 valve closed
12/13/2010	12:01:48 PM	BCl3 valve closed
12/13/2010	12:01:48 PM	PH3 valve closed
12/13/2010	12:01:48 PM	SiCl4 pre valve closed
12/13/2010	12:01:48 PM	SiCl4 post valve closed
12/13/2010	12:01:48 PM	Main Vac valve closed
12/13/2010	12:01:48 PM	Bypass valve closed
12/13/2010	12:01:48 PM	Bubbler valve closed
12/13/2010	12:01:48 PM	Helium MFC set to  0.000000
12/13/2010	12:01:48 PM	H2 MFC set to  0.000000
12/13/2010	12:01:48 PM	BCl3 MFC set to  0.000000
12/13/2010	12:01:48 PM	PHl3 MFC set to  0.000000
12/13/2010	12:01:48 PM	SiCl4 MFC set to  0.000000
12/13/2010	12:01:48 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	12:01:48 PM	Tube furnace set to 0
12/13/2010	12:01:48 PM	Run finished at 12:01 PM
12/13/2010	12:01:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/13/2010	12:01:53 PM	Recipe started at 12:01 PM
12/13/2010	12:01:54 PM	Helium valve closed
12/13/2010	12:01:54 PM	H2 valve closed
12/13/2010	12:01:54 PM	BCl3 valve closed
12/13/2010	12:01:54 PM	PH3 valve closed
12/13/2010	12:01:54 PM	SiCl4 pre valve closed
12/13/2010	12:01:54 PM	SiCl4 post valve closed
12/13/2010	12:01:54 PM	Main Vac valve closed
12/13/2010	12:01:54 PM	Bubbler valve closed
12/13/2010	12:01:54 PM	Bypass valve opened
12/13/2010	12:01:54 PM	Helium MFC set to  0.000000
12/13/2010	12:01:54 PM	H2 MFC set to  0.000000
12/13/2010	12:01:54 PM	BCl3 MFC set to  0.000000
12/13/2010	12:01:54 PM	PHl3 MFC set to  0.000000
12/13/2010	12:01:54 PM	SiCl4 MFC set to  0.000000
12/13/2010	12:01:54 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	12:01:54 PM	Tube furnace set to 0
12/13/2010	12:02:22 PM	Helium valve closed
12/13/2010	12:02:22 PM	H2 valve closed
12/13/2010	12:02:22 PM	BCl3 valve closed
12/13/2010	12:02:22 PM	PH3 valve closed
12/13/2010	12:02:22 PM	SiCl4 pre valve closed
12/13/2010	12:02:22 PM	SiCl4 post valve closed
12/13/2010	12:02:22 PM	Bubbler valve closed
12/13/2010	12:02:22 PM	Main Vac valve opened
12/13/2010	12:02:22 PM	Bypass valve opened
12/13/2010	12:02:22 PM	Helium MFC set to  0.000000
12/13/2010	12:02:22 PM	H2 MFC set to  0.000000
12/13/2010	12:02:22 PM	BCl3 MFC set to  0.000000
12/13/2010	12:02:22 PM	PHl3 MFC set to  0.000000
12/13/2010	12:02:22 PM	SiCl4 MFC set to  0.000000
12/13/2010	12:02:22 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	12:02:22 PM	Tube furnace set to 0
12/13/2010	12:02:23 PM	Run finished at 12:02 PM
12/13/2010	12:02:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/13/2010	1:23:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/13/2010	1:23:31 PM	Recipe started at 1:23 PM
12/13/2010	1:23:31 PM	H2 valve closed
12/13/2010	1:23:31 PM	BCl3 valve closed
12/13/2010	1:23:31 PM	PH3 valve closed
12/13/2010	1:23:31 PM	SiCl4 pre valve closed
12/13/2010	1:23:32 PM	SiCl4 post valve closed
12/13/2010	1:23:32 PM	Main Vac valve closed
12/13/2010	1:23:32 PM	Bypass valve closed
12/13/2010	1:23:32 PM	Bubbler valve closed
12/13/2010	1:23:32 PM	Helium valve opened
12/13/2010	1:23:32 PM	Helium MFC set to  500.000000
12/13/2010	1:23:32 PM	H2 MFC set to  0.000000
12/13/2010	1:23:32 PM	BCl3 MFC set to  0.000000
12/13/2010	1:23:32 PM	PHl3 MFC set to  0.000000
12/13/2010	1:23:32 PM	SiCl4 MFC set to  0.000000
12/13/2010	1:23:32 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	1:23:32 PM	Tube furnace set to 0
12/13/2010	1:24:48 PM	Helium valve closed
12/13/2010	1:24:48 PM	H2 valve closed
12/13/2010	1:24:48 PM	BCl3 valve closed
12/13/2010	1:24:48 PM	PH3 valve closed
12/13/2010	1:24:48 PM	SiCl4 pre valve closed
12/13/2010	1:24:48 PM	SiCl4 post valve closed
12/13/2010	1:24:48 PM	Main Vac valve closed
12/13/2010	1:24:48 PM	Bypass valve closed
12/13/2010	1:24:48 PM	Bubbler valve closed
12/13/2010	1:24:48 PM	Helium MFC set to  0.000000
12/13/2010	1:24:48 PM	H2 MFC set to  0.000000
12/13/2010	1:24:48 PM	BCl3 MFC set to  0.000000
12/13/2010	1:24:48 PM	PHl3 MFC set to  0.000000
12/13/2010	1:24:48 PM	SiCl4 MFC set to  0.000000
12/13/2010	1:24:48 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	1:24:48 PM	Tube furnace set to 0
12/13/2010	1:24:48 PM	Run finished at 1:24 PM
12/13/2010	1:24:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/13/2010	1:28:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/13/2010	1:28:41 PM	Recipe started at 1:28 PM
12/13/2010	1:28:41 PM	Helium valve closed
12/13/2010	1:28:41 PM	H2 valve closed
12/13/2010	1:28:41 PM	BCl3 valve closed
12/13/2010	1:28:41 PM	PH3 valve closed
12/13/2010	1:28:41 PM	SiCl4 pre valve closed
12/13/2010	1:28:41 PM	SiCl4 post valve closed
12/13/2010	1:28:41 PM	Main Vac valve closed
12/13/2010	1:28:41 PM	Bubbler valve closed
12/13/2010	1:28:41 PM	Bypass valve opened
12/13/2010	1:28:41 PM	Helium MFC set to  0.000000
12/13/2010	1:28:41 PM	H2 MFC set to  0.000000
12/13/2010	1:28:41 PM	BCl3 MFC set to  0.000000
12/13/2010	1:28:41 PM	PHl3 MFC set to  0.000000
12/13/2010	1:28:41 PM	SiCl4 MFC set to  0.000000
12/13/2010	1:28:41 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	1:28:41 PM	Tube furnace set to 0
12/13/2010	1:29:33 PM	Helium valve closed
12/13/2010	1:29:33 PM	H2 valve closed
12/13/2010	1:29:33 PM	BCl3 valve closed
12/13/2010	1:29:33 PM	PH3 valve closed
12/13/2010	1:29:33 PM	SiCl4 pre valve closed
12/13/2010	1:29:33 PM	SiCl4 post valve closed
12/13/2010	1:29:33 PM	Bubbler valve closed
12/13/2010	1:29:33 PM	Main Vac valve opened
12/13/2010	1:29:33 PM	Bypass valve opened
12/13/2010	1:29:33 PM	Helium MFC set to  0.000000
12/13/2010	1:29:33 PM	H2 MFC set to  0.000000
12/13/2010	1:29:33 PM	BCl3 MFC set to  0.000000
12/13/2010	1:29:33 PM	PHl3 MFC set to  0.000000
12/13/2010	1:29:33 PM	SiCl4 MFC set to  0.000000
12/13/2010	1:29:33 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	1:29:34 PM	Tube furnace set to 0
12/13/2010	1:30:34 PM	H2 valve closed
12/13/2010	1:30:34 PM	BCl3 valve closed
12/13/2010	1:30:34 PM	PH3 valve closed
12/13/2010	1:30:34 PM	SiCl4 pre valve closed
12/13/2010	1:30:34 PM	SiCl4 post valve closed
12/13/2010	1:30:34 PM	Bubbler valve closed
12/13/2010	1:30:34 PM	Helium valve opened
12/13/2010	1:30:34 PM	Main Vac valve opened
12/13/2010	1:30:34 PM	Bypass valve opened
12/13/2010	1:30:34 PM	Helium MFC set to  100.000000
12/13/2010	1:30:34 PM	H2 MFC set to  0.000000
12/13/2010	1:30:34 PM	BCl3 MFC set to  0.000000
12/13/2010	1:30:34 PM	PHl3 MFC set to  0.000000
12/13/2010	1:30:34 PM	SiCl4 MFC set to  0.000000
12/13/2010	1:30:34 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	1:30:34 PM	Tube furnace set to 0
12/13/2010	1:31:34 PM	Helium valve closed
12/13/2010	1:31:34 PM	H2 valve closed
12/13/2010	1:31:34 PM	BCl3 valve closed
12/13/2010	1:31:34 PM	PH3 valve closed
12/13/2010	1:31:34 PM	SiCl4 pre valve closed
12/13/2010	1:31:34 PM	SiCl4 post valve closed
12/13/2010	1:31:34 PM	Bubbler valve closed
12/13/2010	1:31:34 PM	Main Vac valve opened
12/13/2010	1:31:34 PM	Bypass valve opened
12/13/2010	1:31:34 PM	Helium MFC set to  0.000000
12/13/2010	1:31:34 PM	H2 MFC set to  0.000000
12/13/2010	1:31:34 PM	BCl3 MFC set to  0.000000
12/13/2010	1:31:34 PM	PHl3 MFC set to  0.000000
12/13/2010	1:31:34 PM	SiCl4 MFC set to  0.000000
12/13/2010	1:31:34 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	1:31:34 PM	Tube furnace set to 0
12/13/2010	1:32:34 PM	H2 valve closed
12/13/2010	1:32:34 PM	BCl3 valve closed
12/13/2010	1:32:34 PM	PH3 valve closed
12/13/2010	1:32:34 PM	SiCl4 pre valve closed
12/13/2010	1:32:34 PM	SiCl4 post valve closed
12/13/2010	1:32:34 PM	Bubbler valve closed
12/13/2010	1:32:34 PM	Helium valve opened
12/13/2010	1:32:34 PM	Main Vac valve opened
12/13/2010	1:32:34 PM	Bypass valve opened
12/13/2010	1:32:34 PM	Helium MFC set to  100.000000
12/13/2010	1:32:34 PM	H2 MFC set to  0.000000
12/13/2010	1:32:34 PM	BCl3 MFC set to  0.000000
12/13/2010	1:32:34 PM	PHl3 MFC set to  0.000000
12/13/2010	1:32:34 PM	SiCl4 MFC set to  0.000000
12/13/2010	1:32:34 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	1:32:34 PM	Tube furnace set to 0
12/13/2010	1:33:34 PM	Helium valve closed
12/13/2010	1:33:34 PM	H2 valve closed
12/13/2010	1:33:34 PM	BCl3 valve closed
12/13/2010	1:33:34 PM	PH3 valve closed
12/13/2010	1:33:34 PM	SiCl4 pre valve closed
12/13/2010	1:33:34 PM	SiCl4 post valve closed
12/13/2010	1:33:34 PM	Bubbler valve closed
12/13/2010	1:33:34 PM	Main Vac valve opened
12/13/2010	1:33:34 PM	Bypass valve opened
12/13/2010	1:33:34 PM	Helium MFC set to  0.000000
12/13/2010	1:33:34 PM	H2 MFC set to  0.000000
12/13/2010	1:33:34 PM	BCl3 MFC set to  0.000000
12/13/2010	1:33:34 PM	PHl3 MFC set to  0.000000
12/13/2010	1:33:34 PM	SiCl4 MFC set to  0.000000
12/13/2010	1:33:34 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	1:33:34 PM	Tube furnace set to 0
12/13/2010	1:34:34 PM	H2 valve closed
12/13/2010	1:34:34 PM	BCl3 valve closed
12/13/2010	1:34:34 PM	PH3 valve closed
12/13/2010	1:34:34 PM	SiCl4 pre valve closed
12/13/2010	1:34:34 PM	SiCl4 post valve closed
12/13/2010	1:34:34 PM	Bubbler valve closed
12/13/2010	1:34:34 PM	Helium valve opened
12/13/2010	1:34:34 PM	Main Vac valve opened
12/13/2010	1:34:34 PM	Bypass valve opened
12/13/2010	1:34:34 PM	Helium MFC set to  100.000000
12/13/2010	1:34:34 PM	H2 MFC set to  0.000000
12/13/2010	1:34:34 PM	BCl3 MFC set to  0.000000
12/13/2010	1:34:34 PM	PHl3 MFC set to  0.000000
12/13/2010	1:34:34 PM	SiCl4 MFC set to  0.000000
12/13/2010	1:34:34 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	1:34:34 PM	Tube furnace set to 0
12/13/2010	1:35:35 PM	Helium valve closed
12/13/2010	1:35:35 PM	H2 valve closed
12/13/2010	1:35:35 PM	BCl3 valve closed
12/13/2010	1:35:35 PM	PH3 valve closed
12/13/2010	1:35:35 PM	SiCl4 pre valve closed
12/13/2010	1:35:35 PM	SiCl4 post valve closed
12/13/2010	1:35:35 PM	Bubbler valve closed
12/13/2010	1:35:35 PM	Main Vac valve opened
12/13/2010	1:35:35 PM	Bypass valve opened
12/13/2010	1:35:35 PM	Helium MFC set to  0.000000
12/13/2010	1:35:35 PM	H2 MFC set to  0.000000
12/13/2010	1:35:35 PM	BCl3 MFC set to  0.000000
12/13/2010	1:35:35 PM	PHl3 MFC set to  0.000000
12/13/2010	1:35:35 PM	SiCl4 MFC set to  0.000000
12/13/2010	1:35:35 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	1:35:35 PM	Tube furnace set to 0
12/13/2010	1:36:35 PM	H2 valve closed
12/13/2010	1:36:35 PM	BCl3 valve closed
12/13/2010	1:36:35 PM	PH3 valve closed
12/13/2010	1:36:35 PM	SiCl4 pre valve closed
12/13/2010	1:36:35 PM	SiCl4 post valve closed
12/13/2010	1:36:35 PM	Bubbler valve closed
12/13/2010	1:36:35 PM	Helium valve opened
12/13/2010	1:36:35 PM	Main Vac valve opened
12/13/2010	1:36:35 PM	Bypass valve opened
12/13/2010	1:36:35 PM	Helium MFC set to  100.000000
12/13/2010	1:36:35 PM	H2 MFC set to  0.000000
12/13/2010	1:36:35 PM	BCl3 MFC set to  0.000000
12/13/2010	1:36:35 PM	PHl3 MFC set to  0.000000
12/13/2010	1:36:35 PM	SiCl4 MFC set to  0.000000
12/13/2010	1:36:35 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	1:36:35 PM	Tube furnace set to 0
12/13/2010	1:37:35 PM	Helium valve closed
12/13/2010	1:37:35 PM	H2 valve closed
12/13/2010	1:37:35 PM	BCl3 valve closed
12/13/2010	1:37:35 PM	PH3 valve closed
12/13/2010	1:37:35 PM	SiCl4 pre valve closed
12/13/2010	1:37:35 PM	SiCl4 post valve closed
12/13/2010	1:37:35 PM	Bubbler valve closed
12/13/2010	1:37:35 PM	Main Vac valve opened
12/13/2010	1:37:35 PM	Bypass valve opened
12/13/2010	1:37:35 PM	Helium MFC set to  0.000000
12/13/2010	1:37:35 PM	H2 MFC set to  0.000000
12/13/2010	1:37:35 PM	BCl3 MFC set to  0.000000
12/13/2010	1:37:35 PM	PHl3 MFC set to  0.000000
12/13/2010	1:37:35 PM	SiCl4 MFC set to  0.000000
12/13/2010	1:37:35 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	1:37:35 PM	Tube furnace set to 0
12/13/2010	1:38:35 PM	H2 valve closed
12/13/2010	1:38:35 PM	BCl3 valve closed
12/13/2010	1:38:35 PM	PH3 valve closed
12/13/2010	1:38:35 PM	SiCl4 pre valve closed
12/13/2010	1:38:35 PM	SiCl4 post valve closed
12/13/2010	1:38:35 PM	Bubbler valve closed
12/13/2010	1:38:35 PM	Helium valve opened
12/13/2010	1:38:35 PM	Main Vac valve opened
12/13/2010	1:38:35 PM	Bypass valve opened
12/13/2010	1:38:35 PM	Helium MFC set to  100.000000
12/13/2010	1:38:35 PM	H2 MFC set to  0.000000
12/13/2010	1:38:35 PM	BCl3 MFC set to  0.000000
12/13/2010	1:38:35 PM	PHl3 MFC set to  0.000000
12/13/2010	1:38:35 PM	SiCl4 MFC set to  0.000000
12/13/2010	1:38:35 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	1:38:35 PM	Tube furnace set to 0
12/13/2010	1:39:35 PM	Helium valve closed
12/13/2010	1:39:35 PM	H2 valve closed
12/13/2010	1:39:35 PM	BCl3 valve closed
12/13/2010	1:39:35 PM	PH3 valve closed
12/13/2010	1:39:35 PM	SiCl4 pre valve closed
12/13/2010	1:39:35 PM	SiCl4 post valve closed
12/13/2010	1:39:35 PM	Bubbler valve closed
12/13/2010	1:39:35 PM	Main Vac valve opened
12/13/2010	1:39:35 PM	Bypass valve opened
12/13/2010	1:39:35 PM	Helium MFC set to  0.000000
12/13/2010	1:39:35 PM	H2 MFC set to  0.000000
12/13/2010	1:39:35 PM	BCl3 MFC set to  0.000000
12/13/2010	1:39:35 PM	PHl3 MFC set to  0.000000
12/13/2010	1:39:35 PM	SiCl4 MFC set to  0.000000
12/13/2010	1:39:35 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	1:39:35 PM	Tube furnace set to 0
12/13/2010	1:40:35 PM	H2 valve closed
12/13/2010	1:40:35 PM	BCl3 valve closed
12/13/2010	1:40:35 PM	PH3 valve closed
12/13/2010	1:40:36 PM	SiCl4 pre valve closed
12/13/2010	1:40:36 PM	SiCl4 post valve closed
12/13/2010	1:40:36 PM	Bubbler valve closed
12/13/2010	1:40:36 PM	Helium valve opened
12/13/2010	1:40:36 PM	Main Vac valve opened
12/13/2010	1:40:36 PM	Bypass valve opened
12/13/2010	1:40:36 PM	Helium MFC set to  100.000000
12/13/2010	1:40:36 PM	H2 MFC set to  0.000000
12/13/2010	1:40:36 PM	BCl3 MFC set to  0.000000
12/13/2010	1:40:36 PM	PHl3 MFC set to  0.000000
12/13/2010	1:40:36 PM	SiCl4 MFC set to  0.000000
12/13/2010	1:40:36 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	1:40:36 PM	Tube furnace set to 0
12/13/2010	1:41:36 PM	Helium valve closed
12/13/2010	1:41:36 PM	H2 valve closed
12/13/2010	1:41:36 PM	BCl3 valve closed
12/13/2010	1:41:36 PM	PH3 valve closed
12/13/2010	1:41:36 PM	SiCl4 pre valve closed
12/13/2010	1:41:36 PM	SiCl4 post valve closed
12/13/2010	1:41:36 PM	Bubbler valve closed
12/13/2010	1:41:36 PM	Main Vac valve opened
12/13/2010	1:41:36 PM	Bypass valve opened
12/13/2010	1:41:36 PM	Helium MFC set to  0.000000
12/13/2010	1:41:36 PM	H2 MFC set to  0.000000
12/13/2010	1:41:36 PM	BCl3 MFC set to  0.000000
12/13/2010	1:41:36 PM	PHl3 MFC set to  0.000000
12/13/2010	1:41:36 PM	SiCl4 MFC set to  0.000000
12/13/2010	1:41:36 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	1:41:36 PM	Tube furnace set to 0
12/13/2010	1:42:36 PM	H2 valve closed
12/13/2010	1:42:36 PM	BCl3 valve closed
12/13/2010	1:42:36 PM	PH3 valve closed
12/13/2010	1:42:36 PM	SiCl4 pre valve closed
12/13/2010	1:42:36 PM	SiCl4 post valve closed
12/13/2010	1:42:36 PM	Bubbler valve closed
12/13/2010	1:42:36 PM	Helium valve opened
12/13/2010	1:42:36 PM	Main Vac valve opened
12/13/2010	1:42:36 PM	Bypass valve opened
12/13/2010	1:42:36 PM	Helium MFC set to  100.000000
12/13/2010	1:42:36 PM	H2 MFC set to  0.000000
12/13/2010	1:42:36 PM	BCl3 MFC set to  0.000000
12/13/2010	1:42:36 PM	PHl3 MFC set to  0.000000
12/13/2010	1:42:36 PM	SiCl4 MFC set to  0.000000
12/13/2010	1:42:36 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	1:42:36 PM	Tube furnace set to 0
12/13/2010	1:43:36 PM	Helium valve closed
12/13/2010	1:43:36 PM	H2 valve closed
12/13/2010	1:43:36 PM	BCl3 valve closed
12/13/2010	1:43:36 PM	PH3 valve closed
12/13/2010	1:43:36 PM	SiCl4 pre valve closed
12/13/2010	1:43:36 PM	SiCl4 post valve closed
12/13/2010	1:43:36 PM	Bubbler valve closed
12/13/2010	1:43:36 PM	Main Vac valve opened
12/13/2010	1:43:36 PM	Bypass valve opened
12/13/2010	1:43:36 PM	Helium MFC set to  0.000000
12/13/2010	1:43:36 PM	H2 MFC set to  0.000000
12/13/2010	1:43:36 PM	BCl3 MFC set to  0.000000
12/13/2010	1:43:36 PM	PHl3 MFC set to  0.000000
12/13/2010	1:43:36 PM	SiCl4 MFC set to  0.000000
12/13/2010	1:43:36 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	1:43:36 PM	Tube furnace set to 0
12/13/2010	1:44:36 PM	H2 valve closed
12/13/2010	1:44:36 PM	BCl3 valve closed
12/13/2010	1:44:36 PM	PH3 valve closed
12/13/2010	1:44:36 PM	SiCl4 pre valve closed
12/13/2010	1:44:36 PM	SiCl4 post valve closed
12/13/2010	1:44:36 PM	Bubbler valve closed
12/13/2010	1:44:36 PM	Helium valve opened
12/13/2010	1:44:36 PM	Main Vac valve opened
12/13/2010	1:44:36 PM	Bypass valve opened
12/13/2010	1:44:36 PM	Helium MFC set to  100.000000
12/13/2010	1:44:36 PM	H2 MFC set to  0.000000
12/13/2010	1:44:36 PM	BCl3 MFC set to  0.000000
12/13/2010	1:44:36 PM	PHl3 MFC set to  0.000000
12/13/2010	1:44:36 PM	SiCl4 MFC set to  0.000000
12/13/2010	1:44:36 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	1:44:36 PM	Tube furnace set to 0
12/13/2010	1:45:36 PM	Helium valve closed
12/13/2010	1:45:36 PM	H2 valve closed
12/13/2010	1:45:36 PM	BCl3 valve closed
12/13/2010	1:45:36 PM	PH3 valve closed
12/13/2010	1:45:36 PM	SiCl4 pre valve closed
12/13/2010	1:45:36 PM	SiCl4 post valve closed
12/13/2010	1:45:36 PM	Bubbler valve closed
12/13/2010	1:45:36 PM	Main Vac valve opened
12/13/2010	1:45:36 PM	Bypass valve opened
12/13/2010	1:45:36 PM	Helium MFC set to  0.000000
12/13/2010	1:45:36 PM	H2 MFC set to  0.000000
12/13/2010	1:45:36 PM	BCl3 MFC set to  0.000000
12/13/2010	1:45:36 PM	PHl3 MFC set to  0.000000
12/13/2010	1:45:37 PM	SiCl4 MFC set to  0.000000
12/13/2010	1:45:37 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	1:45:37 PM	Tube furnace set to 0
12/13/2010	1:46:37 PM	H2 valve closed
12/13/2010	1:46:37 PM	BCl3 valve closed
12/13/2010	1:46:37 PM	PH3 valve closed
12/13/2010	1:46:37 PM	SiCl4 pre valve closed
12/13/2010	1:46:37 PM	SiCl4 post valve closed
12/13/2010	1:46:37 PM	Bubbler valve closed
12/13/2010	1:46:37 PM	Helium valve opened
12/13/2010	1:46:37 PM	Main Vac valve opened
12/13/2010	1:46:37 PM	Bypass valve opened
12/13/2010	1:46:37 PM	Helium MFC set to  100.000000
12/13/2010	1:46:37 PM	H2 MFC set to  0.000000
12/13/2010	1:46:37 PM	BCl3 MFC set to  0.000000
12/13/2010	1:46:37 PM	PHl3 MFC set to  0.000000
12/13/2010	1:46:37 PM	SiCl4 MFC set to  0.000000
12/13/2010	1:46:37 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	1:46:37 PM	Tube furnace set to 0
12/13/2010	1:47:37 PM	Helium valve closed
12/13/2010	1:47:37 PM	H2 valve closed
12/13/2010	1:47:37 PM	BCl3 valve closed
12/13/2010	1:47:37 PM	PH3 valve closed
12/13/2010	1:47:37 PM	SiCl4 pre valve closed
12/13/2010	1:47:37 PM	SiCl4 post valve closed
12/13/2010	1:47:37 PM	Bubbler valve closed
12/13/2010	1:47:37 PM	Main Vac valve opened
12/13/2010	1:47:37 PM	Bypass valve opened
12/13/2010	1:47:37 PM	Helium MFC set to  0.000000
12/13/2010	1:47:37 PM	H2 MFC set to  0.000000
12/13/2010	1:47:37 PM	BCl3 MFC set to  0.000000
12/13/2010	1:47:37 PM	PHl3 MFC set to  0.000000
12/13/2010	1:47:37 PM	SiCl4 MFC set to  0.000000
12/13/2010	1:47:37 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	1:47:37 PM	Tube furnace set to 0
12/13/2010	1:48:37 PM	H2 valve closed
12/13/2010	1:48:37 PM	BCl3 valve closed
12/13/2010	1:48:37 PM	PH3 valve closed
12/13/2010	1:48:37 PM	SiCl4 pre valve closed
12/13/2010	1:48:37 PM	SiCl4 post valve closed
12/13/2010	1:48:37 PM	Bubbler valve closed
12/13/2010	1:48:37 PM	Helium valve opened
12/13/2010	1:48:37 PM	Main Vac valve opened
12/13/2010	1:48:37 PM	Bypass valve opened
12/13/2010	1:48:37 PM	Helium MFC set to  100.000000
12/13/2010	1:48:37 PM	H2 MFC set to  0.000000
12/13/2010	1:48:37 PM	BCl3 MFC set to  0.000000
12/13/2010	1:48:37 PM	PHl3 MFC set to  0.000000
12/13/2010	1:48:37 PM	SiCl4 MFC set to  0.000000
12/13/2010	1:48:37 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	1:48:37 PM	Tube furnace set to 0
12/13/2010	1:49:09 PM	Helium valve closed
12/13/2010	1:49:09 PM	H2 valve closed
12/13/2010	1:49:09 PM	BCl3 valve closed
12/13/2010	1:49:09 PM	PH3 valve closed
12/13/2010	1:49:09 PM	SiCl4 pre valve closed
12/13/2010	1:49:09 PM	SiCl4 post valve closed
12/13/2010	1:49:09 PM	Bubbler valve closed
12/13/2010	1:49:09 PM	Main Vac valve opened
12/13/2010	1:49:09 PM	Bypass valve opened
12/13/2010	1:49:09 PM	Helium MFC set to  0.000000
12/13/2010	1:49:09 PM	H2 MFC set to  0.000000
12/13/2010	1:49:09 PM	BCl3 MFC set to  0.000000
12/13/2010	1:49:09 PM	PHl3 MFC set to  0.000000
12/13/2010	1:49:09 PM	SiCl4 MFC set to  0.000000
12/13/2010	1:49:09 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	1:49:09 PM	Tube furnace set to 0
12/13/2010	1:49:10 PM	Run finished at 1:49 PM
12/13/2010	1:49:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/13/2010	1:49:47 PM	Main Vac valve closed
12/13/2010	1:49:49 PM	Bypass valve closed
12/13/2010	1:50:17 PM	Bypass valve opened
12/13/2010	1:50:18 PM	Main Vac valve opened
12/13/2010	1:50:27 PM	Helium MFC set to  100.000000
12/13/2010	1:50:28 PM	Helium valve opened
12/13/2010	1:53:42 PM	Helium MFC set to  0.000000
12/13/2010	1:53:43 PM	Helium valve closed
12/13/2010	1:55:31 PM	Recipe started at 1:55 PM
12/13/2010	1:55:31 PM	Helium valve closed
12/13/2010	1:55:31 PM	BCl3 valve closed
12/13/2010	1:55:31 PM	PH3 valve closed
12/13/2010	1:55:31 PM	SiCl4 pre valve closed
12/13/2010	1:55:31 PM	SiCl4 post valve closed
12/13/2010	1:55:31 PM	Main Vac valve closed
12/13/2010	1:55:31 PM	Bypass valve closed
12/13/2010	1:55:31 PM	Bubbler valve closed
12/13/2010	1:55:31 PM	H2 valve opened
12/13/2010	1:55:31 PM	Helium MFC set to  0.000000
12/13/2010	1:55:31 PM	H2 MFC set to  500.000000
12/13/2010	1:55:31 PM	BCl3 MFC set to  0.000000
12/13/2010	1:55:31 PM	PHl3 MFC set to  0.000000
12/13/2010	1:55:31 PM	SiCl4 MFC set to  0.000000
12/13/2010	1:55:31 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	1:55:31 PM	Tube furnace set to 200
12/13/2010	1:56:51 PM	Helium valve closed
12/13/2010	1:56:51 PM	BCl3 valve closed
12/13/2010	1:56:51 PM	PH3 valve closed
12/13/2010	1:56:51 PM	SiCl4 pre valve closed
12/13/2010	1:56:51 PM	SiCl4 post valve closed
12/13/2010	1:56:51 PM	Main Vac valve closed
12/13/2010	1:56:51 PM	Bypass valve closed
12/13/2010	1:56:51 PM	H2 valve opened
12/13/2010	1:56:51 PM	Bubbler valve opened
12/13/2010	1:56:51 PM	Helium MFC set to  0.000000
12/13/2010	1:56:51 PM	H2 MFC set to  0.000000
12/13/2010	1:56:51 PM	BCl3 MFC set to  0.000000
12/13/2010	1:56:51 PM	PHl3 MFC set to  0.000000
12/13/2010	1:56:51 PM	SiCl4 MFC set to  0.000000
12/13/2010	1:56:51 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	1:56:51 PM	Tube furnace set to 1001
12/13/2010	2:17:51 PM	Helium valve closed
12/13/2010	2:17:51 PM	BCl3 valve closed
12/13/2010	2:17:51 PM	PH3 valve closed
12/13/2010	2:17:51 PM	Main Vac valve closed
12/13/2010	2:17:51 PM	Bypass valve closed
12/13/2010	2:17:51 PM	H2 valve opened
12/13/2010	2:17:51 PM	SiCl4 pre valve opened
12/13/2010	2:17:51 PM	SiCl4 post valve opened
12/13/2010	2:17:51 PM	Bubbler valve opened
12/13/2010	2:17:51 PM	Helium MFC set to  0.000000
12/13/2010	2:17:51 PM	H2 MFC set to  500.000000
12/13/2010	2:17:51 PM	BCl3 MFC set to  0.000000
12/13/2010	2:17:51 PM	PHl3 MFC set to  0.000000
12/13/2010	2:17:51 PM	SiCl4 MFC set to  50.000000
12/13/2010	2:17:51 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	2:17:51 PM	Tube furnace set to 1000
12/13/2010	2:19:51 PM	H2 valve closed
12/13/2010	2:19:51 PM	BCl3 valve closed
12/13/2010	2:19:51 PM	PH3 valve closed
12/13/2010	2:19:51 PM	SiCl4 pre valve closed
12/13/2010	2:19:51 PM	SiCl4 post valve closed
12/13/2010	2:19:51 PM	Main Vac valve closed
12/13/2010	2:19:51 PM	Bypass valve closed
12/13/2010	2:19:51 PM	Helium valve opened
12/13/2010	2:19:51 PM	Bubbler valve opened
12/13/2010	2:19:51 PM	Helium MFC set to  500.000000
12/13/2010	2:19:51 PM	H2 MFC set to  0.000000
12/13/2010	2:19:51 PM	BCl3 MFC set to  0.000000
12/13/2010	2:19:51 PM	PHl3 MFC set to  0.000000
12/13/2010	2:19:51 PM	SiCl4 MFC set to  0.000000
12/13/2010	2:19:51 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	2:19:51 PM	Tube furnace set to 0
12/13/2010	2:39:51 PM	Helium valve closed
12/13/2010	2:39:51 PM	H2 valve closed
12/13/2010	2:39:51 PM	BCl3 valve closed
12/13/2010	2:39:51 PM	PH3 valve closed
12/13/2010	2:39:51 PM	SiCl4 pre valve closed
12/13/2010	2:39:51 PM	SiCl4 post valve closed
12/13/2010	2:39:51 PM	Main Vac valve closed
12/13/2010	2:39:51 PM	Bypass valve closed
12/13/2010	2:39:51 PM	Bubbler valve closed
12/13/2010	2:39:51 PM	Helium MFC set to  0.000000
12/13/2010	2:39:51 PM	H2 MFC set to  0.000000
12/13/2010	2:39:51 PM	BCl3 MFC set to  0.000000
12/13/2010	2:39:51 PM	PHl3 MFC set to  0.000000
12/13/2010	2:39:51 PM	SiCl4 MFC set to  0.000000
12/13/2010	2:39:51 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	2:39:51 PM	Tube furnace set to 0
12/13/2010	2:39:52 PM	Run finished at 2:39 PM
12/13/2010	2:43:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/13/2010	2:43:34 PM	Recipe started at 2:43 PM
12/13/2010	2:43:34 PM	Helium valve closed
12/13/2010	2:43:34 PM	H2 valve closed
12/13/2010	2:43:34 PM	BCl3 valve closed
12/13/2010	2:43:34 PM	PH3 valve closed
12/13/2010	2:43:34 PM	SiCl4 pre valve closed
12/13/2010	2:43:34 PM	SiCl4 post valve closed
12/13/2010	2:43:34 PM	Main Vac valve closed
12/13/2010	2:43:34 PM	Bubbler valve closed
12/13/2010	2:43:34 PM	Bypass valve opened
12/13/2010	2:43:34 PM	Helium MFC set to  0.000000
12/13/2010	2:43:34 PM	H2 MFC set to  0.000000
12/13/2010	2:43:34 PM	BCl3 MFC set to  0.000000
12/13/2010	2:43:34 PM	PHl3 MFC set to  0.000000
12/13/2010	2:43:34 PM	SiCl4 MFC set to  0.000000
12/13/2010	2:43:34 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	2:43:34 PM	Tube furnace set to 0
12/13/2010	2:44:28 PM	Helium valve closed
12/13/2010	2:44:28 PM	H2 valve closed
12/13/2010	2:44:28 PM	BCl3 valve closed
12/13/2010	2:44:28 PM	PH3 valve closed
12/13/2010	2:44:28 PM	SiCl4 pre valve closed
12/13/2010	2:44:28 PM	SiCl4 post valve closed
12/13/2010	2:44:28 PM	Bubbler valve closed
12/13/2010	2:44:28 PM	Main Vac valve opened
12/13/2010	2:44:28 PM	Bypass valve opened
12/13/2010	2:44:28 PM	Helium MFC set to  0.000000
12/13/2010	2:44:28 PM	H2 MFC set to  0.000000
12/13/2010	2:44:28 PM	BCl3 MFC set to  0.000000
12/13/2010	2:44:28 PM	PHl3 MFC set to  0.000000
12/13/2010	2:44:28 PM	SiCl4 MFC set to  0.000000
12/13/2010	2:44:28 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	2:44:28 PM	Tube furnace set to 0
12/13/2010	2:44:29 PM	Run finished at 2:44 PM
12/13/2010	2:44:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/13/2010	2:44:43 PM	Helium MFC set to  100.000000
12/13/2010	2:44:44 PM	Helium valve opened
12/13/2010	2:45:10 PM	Helium MFC set to  0.000000
12/13/2010	2:45:11 PM	Helium valve closed
12/13/2010	2:45:43 PM	Helium MFC set to  100.000000
12/13/2010	2:45:43 PM	Helium valve opened
12/13/2010	2:48:50 PM	Helium MFC set to  0.000000
12/13/2010	2:48:50 PM	Helium valve closed
12/13/2010	2:49:35 PM	Helium MFC set to  100.000000
12/13/2010	2:49:36 PM	Helium valve opened
12/13/2010	2:51:16 PM	Helium MFC set to  0.000000
12/13/2010	2:51:16 PM	Helium valve closed
12/13/2010	3:04:29 PM	Helium MFC set to  100.000000
12/13/2010	3:04:30 PM	Helium valve opened
12/13/2010	3:13:01 PM	Helium MFC set to  0.000000
12/13/2010	3:13:01 PM	Helium valve closed
12/13/2010	3:13:42 PM	Main Vac valve closed
12/13/2010	3:13:44 PM	Bypass valve closed
12/13/2010	3:13:51 PM	Bypass valve opened
12/13/2010	3:13:51 PM	Bypass valve closed
12/13/2010	3:13:51 PM	Bypass valve opened
12/13/2010	3:13:52 PM	Main Vac valve opened
12/13/2010	3:14:46 PM	Recipe started at 3:14 PM
12/13/2010	3:14:46 PM	Helium valve closed
12/13/2010	3:14:46 PM	BCl3 valve closed
12/13/2010	3:14:46 PM	PH3 valve closed
12/13/2010	3:14:46 PM	SiCl4 pre valve closed
12/13/2010	3:14:46 PM	SiCl4 post valve closed
12/13/2010	3:14:46 PM	Main Vac valve closed
12/13/2010	3:14:46 PM	Bypass valve closed
12/13/2010	3:14:46 PM	Bubbler valve closed
12/13/2010	3:14:46 PM	H2 valve opened
12/13/2010	3:14:46 PM	Helium MFC set to  0.000000
12/13/2010	3:14:46 PM	H2 MFC set to  500.000000
12/13/2010	3:14:46 PM	BCl3 MFC set to  0.000000
12/13/2010	3:14:46 PM	PHl3 MFC set to  0.000000
12/13/2010	3:14:46 PM	SiCl4 MFC set to  0.000000
12/13/2010	3:14:46 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	3:14:46 PM	Tube furnace set to 200
12/13/2010	3:16:05 PM	Helium valve closed
12/13/2010	3:16:05 PM	BCl3 valve closed
12/13/2010	3:16:05 PM	PH3 valve closed
12/13/2010	3:16:05 PM	SiCl4 pre valve closed
12/13/2010	3:16:05 PM	SiCl4 post valve closed
12/13/2010	3:16:05 PM	Main Vac valve closed
12/13/2010	3:16:05 PM	Bypass valve closed
12/13/2010	3:16:05 PM	H2 valve opened
12/13/2010	3:16:05 PM	Bubbler valve opened
12/13/2010	3:16:05 PM	Helium MFC set to  0.000000
12/13/2010	3:16:05 PM	H2 MFC set to  500.000000
12/13/2010	3:16:05 PM	BCl3 MFC set to  0.000000
12/13/2010	3:16:05 PM	PHl3 MFC set to  0.000000
12/13/2010	3:16:05 PM	SiCl4 MFC set to  0.000000
12/13/2010	3:16:05 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	3:16:05 PM	Tube furnace set to 1001
12/13/2010	3:37:05 PM	Helium valve closed
12/13/2010	3:37:05 PM	BCl3 valve closed
12/13/2010	3:37:05 PM	PH3 valve closed
12/13/2010	3:37:05 PM	Main Vac valve closed
12/13/2010	3:37:05 PM	Bypass valve closed
12/13/2010	3:37:05 PM	H2 valve opened
12/13/2010	3:37:05 PM	SiCl4 pre valve opened
12/13/2010	3:37:05 PM	SiCl4 post valve opened
12/13/2010	3:37:05 PM	Bubbler valve opened
12/13/2010	3:37:05 PM	Helium MFC set to  0.000000
12/13/2010	3:37:05 PM	H2 MFC set to  500.000000
12/13/2010	3:37:05 PM	BCl3 MFC set to  0.000000
12/13/2010	3:37:05 PM	PHl3 MFC set to  0.000000
12/13/2010	3:37:05 PM	SiCl4 MFC set to  50.000000
12/13/2010	3:37:05 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	3:37:06 PM	Tube furnace set to 1000
12/13/2010	3:39:06 PM	H2 valve closed
12/13/2010	3:39:06 PM	BCl3 valve closed
12/13/2010	3:39:06 PM	PH3 valve closed
12/13/2010	3:39:06 PM	SiCl4 pre valve closed
12/13/2010	3:39:06 PM	SiCl4 post valve closed
12/13/2010	3:39:06 PM	Main Vac valve closed
12/13/2010	3:39:06 PM	Bypass valve closed
12/13/2010	3:39:06 PM	Helium valve opened
12/13/2010	3:39:06 PM	Bubbler valve opened
12/13/2010	3:39:06 PM	Helium MFC set to  500.000000
12/13/2010	3:39:06 PM	H2 MFC set to  0.000000
12/13/2010	3:39:06 PM	BCl3 MFC set to  0.000000
12/13/2010	3:39:06 PM	PHl3 MFC set to  0.000000
12/13/2010	3:39:06 PM	SiCl4 MFC set to  0.000000
12/13/2010	3:39:06 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	3:39:06 PM	Tube furnace set to 0
12/13/2010	3:39:11 PM	Helium valve closed
12/13/2010	3:39:11 PM	H2 valve closed
12/13/2010	3:39:11 PM	BCl3 valve closed
12/13/2010	3:39:11 PM	PH3 valve closed
12/13/2010	3:39:11 PM	SiCl4 pre valve closed
12/13/2010	3:39:11 PM	SiCl4 post valve closed
12/13/2010	3:39:11 PM	Main Vac valve closed
12/13/2010	3:39:11 PM	Bypass valve closed
12/13/2010	3:39:11 PM	Bubbler valve closed
12/13/2010	3:39:11 PM	Helium MFC set to  0.000000
12/13/2010	3:39:11 PM	H2 MFC set to  0.000000
12/13/2010	3:39:11 PM	BCl3 MFC set to  0.000000
12/13/2010	3:39:11 PM	PHl3 MFC set to  0.000000
12/13/2010	3:39:11 PM	SiCl4 MFC set to  0.000000
12/13/2010	3:39:11 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	3:39:11 PM	Tube furnace set to 0
12/13/2010	3:39:16 PM	Helium valve closed
12/13/2010	3:39:16 PM	H2 valve closed
12/13/2010	3:39:16 PM	BCl3 valve closed
12/13/2010	3:39:16 PM	PH3 valve closed
12/13/2010	3:39:16 PM	SiCl4 pre valve closed
12/13/2010	3:39:16 PM	SiCl4 post valve closed
12/13/2010	3:39:16 PM	Main Vac valve closed
12/13/2010	3:39:16 PM	Bubbler valve closed
12/13/2010	3:39:16 PM	Bypass valve opened
12/13/2010	3:39:16 PM	Helium MFC set to  0.000000
12/13/2010	3:39:16 PM	H2 MFC set to  0.000000
12/13/2010	3:39:16 PM	BCl3 MFC set to  0.000000
12/13/2010	3:39:16 PM	PHl3 MFC set to  0.000000
12/13/2010	3:39:16 PM	SiCl4 MFC set to  0.000000
12/13/2010	3:39:16 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	3:39:16 PM	Tube furnace set to 0
12/13/2010	3:39:22 PM	Helium valve closed
12/13/2010	3:39:22 PM	H2 valve closed
12/13/2010	3:39:22 PM	BCl3 valve closed
12/13/2010	3:39:22 PM	PH3 valve closed
12/13/2010	3:39:22 PM	SiCl4 pre valve closed
12/13/2010	3:39:22 PM	SiCl4 post valve closed
12/13/2010	3:39:22 PM	Bubbler valve closed
12/13/2010	3:39:22 PM	Main Vac valve opened
12/13/2010	3:39:22 PM	Bypass valve opened
12/13/2010	3:39:22 PM	Helium MFC set to  0.000000
12/13/2010	3:39:22 PM	H2 MFC set to  0.000000
12/13/2010	3:39:22 PM	BCl3 MFC set to  0.000000
12/13/2010	3:39:22 PM	PHl3 MFC set to  0.000000
12/13/2010	3:39:22 PM	SiCl4 MFC set to  0.000000
12/13/2010	3:39:22 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	3:39:22 PM	Tube furnace set to 0
12/13/2010	3:39:32 PM	H2 valve closed
12/13/2010	3:39:32 PM	BCl3 valve closed
12/13/2010	3:39:32 PM	PH3 valve closed
12/13/2010	3:39:32 PM	SiCl4 pre valve closed
12/13/2010	3:39:32 PM	SiCl4 post valve closed
12/13/2010	3:39:32 PM	Main Vac valve closed
12/13/2010	3:39:32 PM	Bypass valve closed
12/13/2010	3:39:32 PM	Bubbler valve closed
12/13/2010	3:39:32 PM	Helium valve opened
12/13/2010	3:39:32 PM	Helium MFC set to  500.000000
12/13/2010	3:39:32 PM	H2 MFC set to  0.000000
12/13/2010	3:39:32 PM	BCl3 MFC set to  0.000000
12/13/2010	3:39:32 PM	PHl3 MFC set to  0.000000
12/13/2010	3:39:32 PM	SiCl4 MFC set to  0.000000
12/13/2010	3:39:32 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	3:39:32 PM	Tube furnace set to 0
12/13/2010	3:40:41 PM	H2 valve closed
12/13/2010	3:40:41 PM	BCl3 valve closed
12/13/2010	3:40:41 PM	PH3 valve closed
12/13/2010	3:40:41 PM	SiCl4 pre valve closed
12/13/2010	3:40:41 PM	SiCl4 post valve closed
12/13/2010	3:40:41 PM	Main Vac valve closed
12/13/2010	3:40:41 PM	Bypass valve closed
12/13/2010	3:40:41 PM	Helium valve opened
12/13/2010	3:40:41 PM	Bubbler valve opened
12/13/2010	3:40:41 PM	Helium MFC set to  500.000000
12/13/2010	3:40:41 PM	H2 MFC set to  0.000000
12/13/2010	3:40:41 PM	BCl3 MFC set to  0.000000
12/13/2010	3:40:41 PM	PHl3 MFC set to  0.000000
12/13/2010	3:40:41 PM	SiCl4 MFC set to  0.000000
12/13/2010	3:40:41 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	3:40:41 PM	Tube furnace set to 0
12/13/2010	4:00:41 PM	Helium valve closed
12/13/2010	4:00:41 PM	H2 valve closed
12/13/2010	4:00:41 PM	BCl3 valve closed
12/13/2010	4:00:41 PM	PH3 valve closed
12/13/2010	4:00:41 PM	SiCl4 pre valve closed
12/13/2010	4:00:41 PM	SiCl4 post valve closed
12/13/2010	4:00:41 PM	Main Vac valve closed
12/13/2010	4:00:41 PM	Bypass valve closed
12/13/2010	4:00:41 PM	Bubbler valve closed
12/13/2010	4:00:41 PM	Helium MFC set to  0.000000
12/13/2010	4:00:41 PM	H2 MFC set to  0.000000
12/13/2010	4:00:41 PM	BCl3 MFC set to  0.000000
12/13/2010	4:00:41 PM	PHl3 MFC set to  0.000000
12/13/2010	4:00:41 PM	SiCl4 MFC set to  0.000000
12/13/2010	4:00:41 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	4:00:42 PM	Tube furnace set to 0
12/13/2010	4:00:42 PM	Run finished at 4:00 PM
12/13/2010	4:03:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/13/2010	4:03:16 PM	Recipe started at 4:03 PM
12/13/2010	4:03:16 PM	Helium valve closed
12/13/2010	4:03:16 PM	H2 valve closed
12/13/2010	4:03:16 PM	BCl3 valve closed
12/13/2010	4:03:16 PM	PH3 valve closed
12/13/2010	4:03:16 PM	SiCl4 pre valve closed
12/13/2010	4:03:16 PM	SiCl4 post valve closed
12/13/2010	4:03:16 PM	Main Vac valve closed
12/13/2010	4:03:16 PM	Bubbler valve closed
12/13/2010	4:03:16 PM	Bypass valve opened
12/13/2010	4:03:16 PM	Helium MFC set to  0.000000
12/13/2010	4:03:16 PM	H2 MFC set to  0.000000
12/13/2010	4:03:16 PM	BCl3 MFC set to  0.000000
12/13/2010	4:03:16 PM	PHl3 MFC set to  0.000000
12/13/2010	4:03:16 PM	SiCl4 MFC set to  0.000000
12/13/2010	4:03:16 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	4:03:16 PM	Tube furnace set to 0
12/13/2010	4:04:07 PM	Helium valve closed
12/13/2010	4:04:07 PM	H2 valve closed
12/13/2010	4:04:07 PM	BCl3 valve closed
12/13/2010	4:04:07 PM	PH3 valve closed
12/13/2010	4:04:07 PM	SiCl4 pre valve closed
12/13/2010	4:04:07 PM	SiCl4 post valve closed
12/13/2010	4:04:07 PM	Bubbler valve closed
12/13/2010	4:04:07 PM	Main Vac valve opened
12/13/2010	4:04:07 PM	Bypass valve opened
12/13/2010	4:04:07 PM	Helium MFC set to  0.000000
12/13/2010	4:04:07 PM	H2 MFC set to  0.000000
12/13/2010	4:04:07 PM	BCl3 MFC set to  0.000000
12/13/2010	4:04:07 PM	PHl3 MFC set to  0.000000
12/13/2010	4:04:07 PM	SiCl4 MFC set to  0.000000
12/13/2010	4:04:07 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	4:04:07 PM	Tube furnace set to 0
12/13/2010	4:05:07 PM	H2 valve closed
12/13/2010	4:05:07 PM	BCl3 valve closed
12/13/2010	4:05:07 PM	PH3 valve closed
12/13/2010	4:05:07 PM	SiCl4 pre valve closed
12/13/2010	4:05:07 PM	SiCl4 post valve closed
12/13/2010	4:05:07 PM	Bubbler valve closed
12/13/2010	4:05:07 PM	Helium valve opened
12/13/2010	4:05:07 PM	Main Vac valve opened
12/13/2010	4:05:07 PM	Bypass valve opened
12/13/2010	4:05:07 PM	Helium MFC set to  100.000000
12/13/2010	4:05:07 PM	H2 MFC set to  0.000000
12/13/2010	4:05:07 PM	BCl3 MFC set to  0.000000
12/13/2010	4:05:07 PM	PHl3 MFC set to  0.000000
12/13/2010	4:05:07 PM	SiCl4 MFC set to  0.000000
12/13/2010	4:05:07 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	4:05:07 PM	Tube furnace set to 0
12/13/2010	4:06:07 PM	Helium valve closed
12/13/2010	4:06:07 PM	H2 valve closed
12/13/2010	4:06:07 PM	BCl3 valve closed
12/13/2010	4:06:07 PM	PH3 valve closed
12/13/2010	4:06:07 PM	SiCl4 pre valve closed
12/13/2010	4:06:07 PM	SiCl4 post valve closed
12/13/2010	4:06:07 PM	Bubbler valve closed
12/13/2010	4:06:07 PM	Main Vac valve opened
12/13/2010	4:06:07 PM	Bypass valve opened
12/13/2010	4:06:07 PM	Helium MFC set to  0.000000
12/13/2010	4:06:07 PM	H2 MFC set to  0.000000
12/13/2010	4:06:07 PM	BCl3 MFC set to  0.000000
12/13/2010	4:06:07 PM	PHl3 MFC set to  0.000000
12/13/2010	4:06:07 PM	SiCl4 MFC set to  0.000000
12/13/2010	4:06:07 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	4:06:07 PM	Tube furnace set to 0
12/13/2010	4:07:07 PM	H2 valve closed
12/13/2010	4:07:07 PM	BCl3 valve closed
12/13/2010	4:07:07 PM	PH3 valve closed
12/13/2010	4:07:07 PM	SiCl4 pre valve closed
12/13/2010	4:07:07 PM	SiCl4 post valve closed
12/13/2010	4:07:07 PM	Bubbler valve closed
12/13/2010	4:07:07 PM	Helium valve opened
12/13/2010	4:07:07 PM	Main Vac valve opened
12/13/2010	4:07:07 PM	Bypass valve opened
12/13/2010	4:07:07 PM	Helium MFC set to  100.000000
12/13/2010	4:07:07 PM	H2 MFC set to  0.000000
12/13/2010	4:07:07 PM	BCl3 MFC set to  0.000000
12/13/2010	4:07:07 PM	PHl3 MFC set to  0.000000
12/13/2010	4:07:07 PM	SiCl4 MFC set to  0.000000
12/13/2010	4:07:07 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	4:07:08 PM	Tube furnace set to 0
12/13/2010	4:08:08 PM	Helium valve closed
12/13/2010	4:08:08 PM	H2 valve closed
12/13/2010	4:08:08 PM	BCl3 valve closed
12/13/2010	4:08:08 PM	PH3 valve closed
12/13/2010	4:08:08 PM	SiCl4 pre valve closed
12/13/2010	4:08:08 PM	SiCl4 post valve closed
12/13/2010	4:08:08 PM	Bubbler valve closed
12/13/2010	4:08:08 PM	Main Vac valve opened
12/13/2010	4:08:08 PM	Bypass valve opened
12/13/2010	4:08:08 PM	Helium MFC set to  0.000000
12/13/2010	4:08:08 PM	H2 MFC set to  0.000000
12/13/2010	4:08:08 PM	BCl3 MFC set to  0.000000
12/13/2010	4:08:08 PM	PHl3 MFC set to  0.000000
12/13/2010	4:08:08 PM	SiCl4 MFC set to  0.000000
12/13/2010	4:08:08 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	4:08:08 PM	Tube furnace set to 0
12/13/2010	4:09:08 PM	H2 valve closed
12/13/2010	4:09:08 PM	BCl3 valve closed
12/13/2010	4:09:08 PM	PH3 valve closed
12/13/2010	4:09:08 PM	SiCl4 pre valve closed
12/13/2010	4:09:08 PM	SiCl4 post valve closed
12/13/2010	4:09:08 PM	Bubbler valve closed
12/13/2010	4:09:08 PM	Helium valve opened
12/13/2010	4:09:08 PM	Main Vac valve opened
12/13/2010	4:09:08 PM	Bypass valve opened
12/13/2010	4:09:08 PM	Helium MFC set to  100.000000
12/13/2010	4:09:08 PM	H2 MFC set to  0.000000
12/13/2010	4:09:08 PM	BCl3 MFC set to  0.000000
12/13/2010	4:09:08 PM	PHl3 MFC set to  0.000000
12/13/2010	4:09:08 PM	SiCl4 MFC set to  0.000000
12/13/2010	4:09:08 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	4:09:08 PM	Tube furnace set to 0
12/13/2010	4:10:06 PM	Run aborted at 4:10 PM
12/13/2010	4:10:06 PM	Helium valve closed
12/13/2010	4:10:06 PM	H2 valve closed
12/13/2010	4:10:06 PM	BCl3 valve closed
12/13/2010	4:10:06 PM	PH3 valve closed
12/13/2010	4:10:06 PM	SiCl4 pre valve closed
12/13/2010	4:10:06 PM	SiCl4 post valve closed
12/13/2010	4:10:06 PM	Bypass valve closed
12/13/2010	4:10:06 PM	Main Vac valve closed
12/13/2010	4:10:06 PM	Bubbler valve closed
12/13/2010	4:10:06 PM	Helium MFC set to  0.000000
12/13/2010	4:10:06 PM	H2 MFC set to  0.000000
12/13/2010	4:10:06 PM	BCl3 MFC set to  0.000000
12/13/2010	4:10:06 PM	PHl3 MFC set to  0.000000
12/13/2010	4:10:06 PM	SiCl4 MFC set to  0.000000
12/13/2010	4:10:06 PM	Tube furnace set to 0
12/13/2010	4:10:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/13/2010	4:10:11 PM	Bypass valve opened
12/13/2010	4:10:14 PM	Main Vac valve opened
12/13/2010	4:11:56 PM	Helium MFC set to  100.000000
12/13/2010	4:11:58 PM	Helium valve opened
12/13/2010	4:12:27 PM	Helium MFC set to  0.000000
12/13/2010	4:12:28 PM	Helium valve closed
12/13/2010	4:19:05 PM	Helium MFC set to  100.000000
12/13/2010	4:19:05 PM	Helium valve opened
12/13/2010	4:20:16 PM	Helium MFC set to  0.000000
12/13/2010	4:20:17 PM	Helium valve closed
12/13/2010	4:21:02 PM	Main Vac valve closed
12/13/2010	4:21:05 PM	Bypass valve closed
12/13/2010	4:21:22 PM	Bypass valve opened
12/13/2010	4:21:23 PM	Main Vac valve opened
12/13/2010	4:21:28 PM	Helium MFC set to  50.000000
12/13/2010	4:21:29 PM	Helium valve opened
12/13/2010	4:22:37 PM	Helium MFC set to  0.000000
12/13/2010	4:22:38 PM	Helium valve closed
12/13/2010	4:23:39 PM	Recipe started at 4:23 PM
12/13/2010	4:23:39 PM	Helium valve closed
12/13/2010	4:23:39 PM	BCl3 valve closed
12/13/2010	4:23:39 PM	PH3 valve closed
12/13/2010	4:23:39 PM	SiCl4 pre valve closed
12/13/2010	4:23:39 PM	SiCl4 post valve closed
12/13/2010	4:23:39 PM	Main Vac valve closed
12/13/2010	4:23:39 PM	Bypass valve closed
12/13/2010	4:23:39 PM	Bubbler valve closed
12/13/2010	4:23:39 PM	H2 valve opened
12/13/2010	4:23:39 PM	Helium MFC set to  0.000000
12/13/2010	4:23:39 PM	H2 MFC set to  500.000000
12/13/2010	4:23:39 PM	BCl3 MFC set to  0.000000
12/13/2010	4:23:39 PM	PHl3 MFC set to  0.000000
12/13/2010	4:23:39 PM	SiCl4 MFC set to  0.000000
12/13/2010	4:23:39 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	4:23:39 PM	Tube furnace set to 200
12/13/2010	4:24:58 PM	Helium valve closed
12/13/2010	4:24:58 PM	BCl3 valve closed
12/13/2010	4:24:58 PM	PH3 valve closed
12/13/2010	4:24:58 PM	SiCl4 pre valve closed
12/13/2010	4:24:58 PM	SiCl4 post valve closed
12/13/2010	4:24:58 PM	Main Vac valve closed
12/13/2010	4:24:58 PM	Bypass valve closed
12/13/2010	4:24:58 PM	H2 valve opened
12/13/2010	4:24:58 PM	Bubbler valve opened
12/13/2010	4:24:58 PM	Helium MFC set to  0.000000
12/13/2010	4:24:58 PM	H2 MFC set to  0.000000
12/13/2010	4:24:58 PM	BCl3 MFC set to  0.000000
12/13/2010	4:24:58 PM	PHl3 MFC set to  0.000000
12/13/2010	4:24:58 PM	SiCl4 MFC set to  0.000000
12/13/2010	4:24:58 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	4:24:58 PM	Tube furnace set to 1001
12/13/2010	4:45:58 PM	Helium valve closed
12/13/2010	4:45:58 PM	BCl3 valve closed
12/13/2010	4:45:58 PM	PH3 valve closed
12/13/2010	4:45:58 PM	Main Vac valve closed
12/13/2010	4:45:58 PM	Bypass valve closed
12/13/2010	4:45:58 PM	H2 valve opened
12/13/2010	4:45:58 PM	SiCl4 pre valve opened
12/13/2010	4:45:58 PM	SiCl4 post valve opened
12/13/2010	4:45:58 PM	Bubbler valve opened
12/13/2010	4:45:58 PM	Helium MFC set to  0.000000
12/13/2010	4:45:58 PM	H2 MFC set to  500.000000
12/13/2010	4:45:58 PM	BCl3 MFC set to  0.000000
12/13/2010	4:45:58 PM	PHl3 MFC set to  0.000000
12/13/2010	4:45:58 PM	SiCl4 MFC set to  50.000000
12/13/2010	4:45:58 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	4:45:58 PM	Tube furnace set to 1000
12/13/2010	4:47:58 PM	H2 valve closed
12/13/2010	4:47:58 PM	BCl3 valve closed
12/13/2010	4:47:58 PM	PH3 valve closed
12/13/2010	4:47:58 PM	SiCl4 pre valve closed
12/13/2010	4:47:58 PM	SiCl4 post valve closed
12/13/2010	4:47:58 PM	Main Vac valve closed
12/13/2010	4:47:58 PM	Bypass valve closed
12/13/2010	4:47:58 PM	Helium valve opened
12/13/2010	4:47:58 PM	Bubbler valve opened
12/13/2010	4:47:58 PM	Helium MFC set to  500.000000
12/13/2010	4:47:58 PM	H2 MFC set to  0.000000
12/13/2010	4:47:58 PM	BCl3 MFC set to  0.000000
12/13/2010	4:47:58 PM	PHl3 MFC set to  0.000000
12/13/2010	4:47:58 PM	SiCl4 MFC set to  0.000000
12/13/2010	4:47:58 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	4:47:58 PM	Tube furnace set to 0
12/13/2010	5:07:59 PM	Helium valve closed
12/13/2010	5:07:59 PM	H2 valve closed
12/13/2010	5:07:59 PM	BCl3 valve closed
12/13/2010	5:07:59 PM	PH3 valve closed
12/13/2010	5:07:59 PM	SiCl4 pre valve closed
12/13/2010	5:07:59 PM	SiCl4 post valve closed
12/13/2010	5:07:59 PM	Main Vac valve closed
12/13/2010	5:07:59 PM	Bypass valve closed
12/13/2010	5:07:59 PM	Bubbler valve closed
12/13/2010	5:07:59 PM	Helium MFC set to  0.000000
12/13/2010	5:07:59 PM	H2 MFC set to  0.000000
12/13/2010	5:07:59 PM	BCl3 MFC set to  0.000000
12/13/2010	5:07:59 PM	PHl3 MFC set to  0.000000
12/13/2010	5:07:59 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:07:59 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:07:59 PM	Tube furnace set to 0
12/13/2010	5:07:59 PM	Run finished at 5:07 PM
12/13/2010	5:12:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/13/2010	5:12:22 PM	Recipe started at 5:12 PM
12/13/2010	5:12:22 PM	Helium valve closed
12/13/2010	5:12:22 PM	H2 valve closed
12/13/2010	5:12:22 PM	BCl3 valve closed
12/13/2010	5:12:22 PM	PH3 valve closed
12/13/2010	5:12:22 PM	SiCl4 pre valve closed
12/13/2010	5:12:22 PM	SiCl4 post valve closed
12/13/2010	5:12:22 PM	Main Vac valve closed
12/13/2010	5:12:22 PM	Bubbler valve closed
12/13/2010	5:12:22 PM	Bypass valve opened
12/13/2010	5:12:22 PM	Helium MFC set to  0.000000
12/13/2010	5:12:22 PM	H2 MFC set to  0.000000
12/13/2010	5:12:22 PM	BCl3 MFC set to  0.000000
12/13/2010	5:12:22 PM	PHl3 MFC set to  0.000000
12/13/2010	5:12:22 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:12:22 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:12:23 PM	Tube furnace set to 0
12/13/2010	5:13:16 PM	Helium valve closed
12/13/2010	5:13:16 PM	H2 valve closed
12/13/2010	5:13:16 PM	BCl3 valve closed
12/13/2010	5:13:16 PM	PH3 valve closed
12/13/2010	5:13:16 PM	SiCl4 pre valve closed
12/13/2010	5:13:16 PM	SiCl4 post valve closed
12/13/2010	5:13:16 PM	Bubbler valve closed
12/13/2010	5:13:16 PM	Main Vac valve opened
12/13/2010	5:13:16 PM	Bypass valve opened
12/13/2010	5:13:16 PM	Helium MFC set to  0.000000
12/13/2010	5:13:16 PM	H2 MFC set to  0.000000
12/13/2010	5:13:16 PM	BCl3 MFC set to  0.000000
12/13/2010	5:13:16 PM	PHl3 MFC set to  0.000000
12/13/2010	5:13:16 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:13:16 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:13:16 PM	Tube furnace set to 0
12/13/2010	5:14:16 PM	H2 valve closed
12/13/2010	5:14:16 PM	BCl3 valve closed
12/13/2010	5:14:16 PM	PH3 valve closed
12/13/2010	5:14:16 PM	SiCl4 pre valve closed
12/13/2010	5:14:16 PM	SiCl4 post valve closed
12/13/2010	5:14:16 PM	Bubbler valve closed
12/13/2010	5:14:16 PM	Helium valve opened
12/13/2010	5:14:16 PM	Main Vac valve opened
12/13/2010	5:14:16 PM	Bypass valve opened
12/13/2010	5:14:16 PM	Helium MFC set to  100.000000
12/13/2010	5:14:16 PM	H2 MFC set to  0.000000
12/13/2010	5:14:16 PM	BCl3 MFC set to  0.000000
12/13/2010	5:14:16 PM	PHl3 MFC set to  0.000000
12/13/2010	5:14:16 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:14:16 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:14:16 PM	Tube furnace set to 0
12/13/2010	5:15:16 PM	Helium valve closed
12/13/2010	5:15:16 PM	H2 valve closed
12/13/2010	5:15:16 PM	BCl3 valve closed
12/13/2010	5:15:16 PM	PH3 valve closed
12/13/2010	5:15:16 PM	SiCl4 pre valve closed
12/13/2010	5:15:16 PM	SiCl4 post valve closed
12/13/2010	5:15:16 PM	Bubbler valve closed
12/13/2010	5:15:16 PM	Main Vac valve opened
12/13/2010	5:15:16 PM	Bypass valve opened
12/13/2010	5:15:16 PM	Helium MFC set to  0.000000
12/13/2010	5:15:16 PM	H2 MFC set to  0.000000
12/13/2010	5:15:16 PM	BCl3 MFC set to  0.000000
12/13/2010	5:15:16 PM	PHl3 MFC set to  0.000000
12/13/2010	5:15:16 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:15:16 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:15:16 PM	Tube furnace set to 0
12/13/2010	5:16:16 PM	H2 valve closed
12/13/2010	5:16:16 PM	BCl3 valve closed
12/13/2010	5:16:16 PM	PH3 valve closed
12/13/2010	5:16:16 PM	SiCl4 pre valve closed
12/13/2010	5:16:16 PM	SiCl4 post valve closed
12/13/2010	5:16:16 PM	Bubbler valve closed
12/13/2010	5:16:16 PM	Helium valve opened
12/13/2010	5:16:16 PM	Main Vac valve opened
12/13/2010	5:16:16 PM	Bypass valve opened
12/13/2010	5:16:16 PM	Helium MFC set to  100.000000
12/13/2010	5:16:16 PM	H2 MFC set to  0.000000
12/13/2010	5:16:16 PM	BCl3 MFC set to  0.000000
12/13/2010	5:16:16 PM	PHl3 MFC set to  0.000000
12/13/2010	5:16:16 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:16:16 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:16:16 PM	Tube furnace set to 0
12/13/2010	5:17:16 PM	Helium valve closed
12/13/2010	5:17:16 PM	H2 valve closed
12/13/2010	5:17:16 PM	BCl3 valve closed
12/13/2010	5:17:16 PM	PH3 valve closed
12/13/2010	5:17:16 PM	SiCl4 pre valve closed
12/13/2010	5:17:16 PM	SiCl4 post valve closed
12/13/2010	5:17:16 PM	Bubbler valve closed
12/13/2010	5:17:16 PM	Main Vac valve opened
12/13/2010	5:17:16 PM	Bypass valve opened
12/13/2010	5:17:16 PM	Helium MFC set to  0.000000
12/13/2010	5:17:16 PM	H2 MFC set to  0.000000
12/13/2010	5:17:16 PM	BCl3 MFC set to  0.000000
12/13/2010	5:17:16 PM	PHl3 MFC set to  0.000000
12/13/2010	5:17:16 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:17:16 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:17:17 PM	Tube furnace set to 0
12/13/2010	5:18:17 PM	H2 valve closed
12/13/2010	5:18:17 PM	BCl3 valve closed
12/13/2010	5:18:17 PM	PH3 valve closed
12/13/2010	5:18:17 PM	SiCl4 pre valve closed
12/13/2010	5:18:17 PM	SiCl4 post valve closed
12/13/2010	5:18:17 PM	Bubbler valve closed
12/13/2010	5:18:17 PM	Helium valve opened
12/13/2010	5:18:17 PM	Main Vac valve opened
12/13/2010	5:18:17 PM	Bypass valve opened
12/13/2010	5:18:17 PM	Helium MFC set to  100.000000
12/13/2010	5:18:17 PM	H2 MFC set to  0.000000
12/13/2010	5:18:17 PM	BCl3 MFC set to  0.000000
12/13/2010	5:18:17 PM	PHl3 MFC set to  0.000000
12/13/2010	5:18:17 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:18:17 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:18:17 PM	Tube furnace set to 0
12/13/2010	5:19:17 PM	Helium valve closed
12/13/2010	5:19:17 PM	H2 valve closed
12/13/2010	5:19:17 PM	BCl3 valve closed
12/13/2010	5:19:17 PM	PH3 valve closed
12/13/2010	5:19:17 PM	SiCl4 pre valve closed
12/13/2010	5:19:17 PM	SiCl4 post valve closed
12/13/2010	5:19:17 PM	Bubbler valve closed
12/13/2010	5:19:17 PM	Main Vac valve opened
12/13/2010	5:19:17 PM	Bypass valve opened
12/13/2010	5:19:17 PM	Helium MFC set to  0.000000
12/13/2010	5:19:17 PM	H2 MFC set to  0.000000
12/13/2010	5:19:17 PM	BCl3 MFC set to  0.000000
12/13/2010	5:19:17 PM	PHl3 MFC set to  0.000000
12/13/2010	5:19:17 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:19:17 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:19:17 PM	Tube furnace set to 0
12/13/2010	5:20:17 PM	H2 valve closed
12/13/2010	5:20:17 PM	BCl3 valve closed
12/13/2010	5:20:17 PM	PH3 valve closed
12/13/2010	5:20:17 PM	SiCl4 pre valve closed
12/13/2010	5:20:17 PM	SiCl4 post valve closed
12/13/2010	5:20:17 PM	Bubbler valve closed
12/13/2010	5:20:17 PM	Helium valve opened
12/13/2010	5:20:17 PM	Main Vac valve opened
12/13/2010	5:20:17 PM	Bypass valve opened
12/13/2010	5:20:17 PM	Helium MFC set to  100.000000
12/13/2010	5:20:17 PM	H2 MFC set to  0.000000
12/13/2010	5:20:17 PM	BCl3 MFC set to  0.000000
12/13/2010	5:20:17 PM	PHl3 MFC set to  0.000000
12/13/2010	5:20:17 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:20:17 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:20:17 PM	Tube furnace set to 0
12/13/2010	5:21:17 PM	Helium valve closed
12/13/2010	5:21:17 PM	H2 valve closed
12/13/2010	5:21:17 PM	BCl3 valve closed
12/13/2010	5:21:17 PM	PH3 valve closed
12/13/2010	5:21:17 PM	SiCl4 pre valve closed
12/13/2010	5:21:17 PM	SiCl4 post valve closed
12/13/2010	5:21:17 PM	Bubbler valve closed
12/13/2010	5:21:17 PM	Main Vac valve opened
12/13/2010	5:21:17 PM	Bypass valve opened
12/13/2010	5:21:17 PM	Helium MFC set to  0.000000
12/13/2010	5:21:17 PM	H2 MFC set to  0.000000
12/13/2010	5:21:17 PM	BCl3 MFC set to  0.000000
12/13/2010	5:21:17 PM	PHl3 MFC set to  0.000000
12/13/2010	5:21:17 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:21:17 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:21:17 PM	Tube furnace set to 0
12/13/2010	5:22:17 PM	H2 valve closed
12/13/2010	5:22:17 PM	BCl3 valve closed
12/13/2010	5:22:17 PM	PH3 valve closed
12/13/2010	5:22:17 PM	SiCl4 pre valve closed
12/13/2010	5:22:17 PM	SiCl4 post valve closed
12/13/2010	5:22:17 PM	Bubbler valve closed
12/13/2010	5:22:17 PM	Helium valve opened
12/13/2010	5:22:17 PM	Main Vac valve opened
12/13/2010	5:22:17 PM	Bypass valve opened
12/13/2010	5:22:17 PM	Helium MFC set to  100.000000
12/13/2010	5:22:17 PM	H2 MFC set to  0.000000
12/13/2010	5:22:17 PM	BCl3 MFC set to  0.000000
12/13/2010	5:22:17 PM	PHl3 MFC set to  0.000000
12/13/2010	5:22:17 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:22:17 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:22:18 PM	Tube furnace set to 0
12/13/2010	5:23:18 PM	Helium valve closed
12/13/2010	5:23:18 PM	H2 valve closed
12/13/2010	5:23:18 PM	BCl3 valve closed
12/13/2010	5:23:18 PM	PH3 valve closed
12/13/2010	5:23:18 PM	SiCl4 pre valve closed
12/13/2010	5:23:18 PM	SiCl4 post valve closed
12/13/2010	5:23:18 PM	Bubbler valve closed
12/13/2010	5:23:18 PM	Main Vac valve opened
12/13/2010	5:23:18 PM	Bypass valve opened
12/13/2010	5:23:18 PM	Helium MFC set to  0.000000
12/13/2010	5:23:18 PM	H2 MFC set to  0.000000
12/13/2010	5:23:18 PM	BCl3 MFC set to  0.000000
12/13/2010	5:23:18 PM	PHl3 MFC set to  0.000000
12/13/2010	5:23:18 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:23:18 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:23:18 PM	Tube furnace set to 0
12/13/2010	5:24:18 PM	H2 valve closed
12/13/2010	5:24:18 PM	BCl3 valve closed
12/13/2010	5:24:18 PM	PH3 valve closed
12/13/2010	5:24:18 PM	SiCl4 pre valve closed
12/13/2010	5:24:18 PM	SiCl4 post valve closed
12/13/2010	5:24:18 PM	Bubbler valve closed
12/13/2010	5:24:18 PM	Helium valve opened
12/13/2010	5:24:18 PM	Main Vac valve opened
12/13/2010	5:24:18 PM	Bypass valve opened
12/13/2010	5:24:18 PM	Helium MFC set to  100.000000
12/13/2010	5:24:18 PM	H2 MFC set to  0.000000
12/13/2010	5:24:18 PM	BCl3 MFC set to  0.000000
12/13/2010	5:24:18 PM	PHl3 MFC set to  0.000000
12/13/2010	5:24:18 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:24:18 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:24:18 PM	Tube furnace set to 0
12/13/2010	5:25:18 PM	Helium valve closed
12/13/2010	5:25:18 PM	H2 valve closed
12/13/2010	5:25:18 PM	BCl3 valve closed
12/13/2010	5:25:18 PM	PH3 valve closed
12/13/2010	5:25:18 PM	SiCl4 pre valve closed
12/13/2010	5:25:18 PM	SiCl4 post valve closed
12/13/2010	5:25:18 PM	Bubbler valve closed
12/13/2010	5:25:18 PM	Main Vac valve opened
12/13/2010	5:25:18 PM	Bypass valve opened
12/13/2010	5:25:18 PM	Helium MFC set to  0.000000
12/13/2010	5:25:18 PM	H2 MFC set to  0.000000
12/13/2010	5:25:18 PM	BCl3 MFC set to  0.000000
12/13/2010	5:25:18 PM	PHl3 MFC set to  0.000000
12/13/2010	5:25:18 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:25:18 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:25:18 PM	Tube furnace set to 0
12/13/2010	5:26:18 PM	H2 valve closed
12/13/2010	5:26:18 PM	BCl3 valve closed
12/13/2010	5:26:18 PM	PH3 valve closed
12/13/2010	5:26:18 PM	SiCl4 pre valve closed
12/13/2010	5:26:18 PM	SiCl4 post valve closed
12/13/2010	5:26:18 PM	Bubbler valve closed
12/13/2010	5:26:18 PM	Helium valve opened
12/13/2010	5:26:18 PM	Main Vac valve opened
12/13/2010	5:26:18 PM	Bypass valve opened
12/13/2010	5:26:18 PM	Helium MFC set to  100.000000
12/13/2010	5:26:18 PM	H2 MFC set to  0.000000
12/13/2010	5:26:18 PM	BCl3 MFC set to  0.000000
12/13/2010	5:26:18 PM	PHl3 MFC set to  0.000000
12/13/2010	5:26:18 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:26:18 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:26:18 PM	Tube furnace set to 0
12/13/2010	5:27:18 PM	Helium valve closed
12/13/2010	5:27:18 PM	H2 valve closed
12/13/2010	5:27:18 PM	BCl3 valve closed
12/13/2010	5:27:18 PM	PH3 valve closed
12/13/2010	5:27:18 PM	SiCl4 pre valve closed
12/13/2010	5:27:18 PM	SiCl4 post valve closed
12/13/2010	5:27:18 PM	Bubbler valve closed
12/13/2010	5:27:18 PM	Main Vac valve opened
12/13/2010	5:27:18 PM	Bypass valve opened
12/13/2010	5:27:18 PM	Helium MFC set to  0.000000
12/13/2010	5:27:18 PM	H2 MFC set to  0.000000
12/13/2010	5:27:18 PM	BCl3 MFC set to  0.000000
12/13/2010	5:27:18 PM	PHl3 MFC set to  0.000000
12/13/2010	5:27:18 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:27:18 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:27:19 PM	Tube furnace set to 0
12/13/2010	5:28:19 PM	H2 valve closed
12/13/2010	5:28:19 PM	BCl3 valve closed
12/13/2010	5:28:19 PM	PH3 valve closed
12/13/2010	5:28:19 PM	SiCl4 pre valve closed
12/13/2010	5:28:19 PM	SiCl4 post valve closed
12/13/2010	5:28:19 PM	Bubbler valve closed
12/13/2010	5:28:19 PM	Helium valve opened
12/13/2010	5:28:19 PM	Main Vac valve opened
12/13/2010	5:28:19 PM	Bypass valve opened
12/13/2010	5:28:19 PM	Helium MFC set to  100.000000
12/13/2010	5:28:19 PM	H2 MFC set to  0.000000
12/13/2010	5:28:19 PM	BCl3 MFC set to  0.000000
12/13/2010	5:28:19 PM	PHl3 MFC set to  0.000000
12/13/2010	5:28:19 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:28:19 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:28:19 PM	Tube furnace set to 0
12/13/2010	5:28:24 PM	Helium valve closed
12/13/2010	5:28:24 PM	H2 valve closed
12/13/2010	5:28:24 PM	BCl3 valve closed
12/13/2010	5:28:24 PM	PH3 valve closed
12/13/2010	5:28:24 PM	SiCl4 pre valve closed
12/13/2010	5:28:24 PM	SiCl4 post valve closed
12/13/2010	5:28:24 PM	Bubbler valve closed
12/13/2010	5:28:24 PM	Main Vac valve opened
12/13/2010	5:28:24 PM	Bypass valve opened
12/13/2010	5:28:24 PM	Helium MFC set to  0.000000
12/13/2010	5:28:24 PM	H2 MFC set to  0.000000
12/13/2010	5:28:24 PM	BCl3 MFC set to  0.000000
12/13/2010	5:28:24 PM	PHl3 MFC set to  0.000000
12/13/2010	5:28:24 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:28:24 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:28:24 PM	Tube furnace set to 0
12/13/2010	5:28:27 PM	H2 valve closed
12/13/2010	5:28:27 PM	BCl3 valve closed
12/13/2010	5:28:27 PM	PH3 valve closed
12/13/2010	5:28:27 PM	SiCl4 pre valve closed
12/13/2010	5:28:27 PM	SiCl4 post valve closed
12/13/2010	5:28:27 PM	Bubbler valve closed
12/13/2010	5:28:27 PM	Helium valve opened
12/13/2010	5:28:27 PM	Main Vac valve opened
12/13/2010	5:28:27 PM	Bypass valve opened
12/13/2010	5:28:27 PM	Helium MFC set to  100.000000
12/13/2010	5:28:27 PM	H2 MFC set to  0.000000
12/13/2010	5:28:27 PM	BCl3 MFC set to  0.000000
12/13/2010	5:28:27 PM	PHl3 MFC set to  0.000000
12/13/2010	5:28:27 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:28:27 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:28:28 PM	Tube furnace set to 0
12/13/2010	5:28:28 PM	Helium valve closed
12/13/2010	5:28:28 PM	H2 valve closed
12/13/2010	5:28:28 PM	BCl3 valve closed
12/13/2010	5:28:28 PM	PH3 valve closed
12/13/2010	5:28:28 PM	SiCl4 pre valve closed
12/13/2010	5:28:28 PM	SiCl4 post valve closed
12/13/2010	5:28:28 PM	Bubbler valve closed
12/13/2010	5:28:28 PM	Main Vac valve opened
12/13/2010	5:28:28 PM	Bypass valve opened
12/13/2010	5:28:28 PM	Helium MFC set to  0.000000
12/13/2010	5:28:28 PM	H2 MFC set to  0.000000
12/13/2010	5:28:28 PM	BCl3 MFC set to  0.000000
12/13/2010	5:28:28 PM	PHl3 MFC set to  0.000000
12/13/2010	5:28:28 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:28:28 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:28:29 PM	Tube furnace set to 0
12/13/2010	5:28:32 PM	H2 valve closed
12/13/2010	5:28:32 PM	BCl3 valve closed
12/13/2010	5:28:32 PM	PH3 valve closed
12/13/2010	5:28:32 PM	SiCl4 pre valve closed
12/13/2010	5:28:32 PM	SiCl4 post valve closed
12/13/2010	5:28:32 PM	Bubbler valve closed
12/13/2010	5:28:32 PM	Helium valve opened
12/13/2010	5:28:32 PM	Main Vac valve opened
12/13/2010	5:28:32 PM	Bypass valve opened
12/13/2010	5:28:32 PM	Helium MFC set to  100.000000
12/13/2010	5:28:32 PM	H2 MFC set to  0.000000
12/13/2010	5:28:32 PM	BCl3 MFC set to  0.000000
12/13/2010	5:28:32 PM	PHl3 MFC set to  0.000000
12/13/2010	5:28:32 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:28:32 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:28:32 PM	Tube furnace set to 0
12/13/2010	5:28:33 PM	Helium valve closed
12/13/2010	5:28:33 PM	H2 valve closed
12/13/2010	5:28:33 PM	BCl3 valve closed
12/13/2010	5:28:33 PM	PH3 valve closed
12/13/2010	5:28:33 PM	SiCl4 pre valve closed
12/13/2010	5:28:33 PM	SiCl4 post valve closed
12/13/2010	5:28:33 PM	Bubbler valve closed
12/13/2010	5:28:33 PM	Main Vac valve opened
12/13/2010	5:28:33 PM	Bypass valve opened
12/13/2010	5:28:33 PM	Helium MFC set to  0.000000
12/13/2010	5:28:33 PM	H2 MFC set to  0.000000
12/13/2010	5:28:33 PM	BCl3 MFC set to  0.000000
12/13/2010	5:28:33 PM	PHl3 MFC set to  0.000000
12/13/2010	5:28:33 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:28:33 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:28:33 PM	Tube furnace set to 0
12/13/2010	5:28:34 PM	Run finished at 5:28 PM
12/13/2010	5:28:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/13/2010	5:29:12 PM	Main Vac valve closed
12/13/2010	5:29:14 PM	Bypass valve closed
12/13/2010	5:29:25 PM	Bypass valve opened
12/13/2010	5:29:26 PM	Main Vac valve opened
12/13/2010	5:29:35 PM	Helium MFC set to  100.000000
12/13/2010	5:29:36 PM	Helium valve opened
12/13/2010	5:30:15 PM	Helium MFC set to  0.000000
12/13/2010	5:30:17 PM	Helium valve closed
12/13/2010	5:31:24 PM	Recipe started at 5:31 PM
12/13/2010	5:31:24 PM	Helium valve closed
12/13/2010	5:31:24 PM	BCl3 valve closed
12/13/2010	5:31:24 PM	PH3 valve closed
12/13/2010	5:31:24 PM	SiCl4 pre valve closed
12/13/2010	5:31:24 PM	SiCl4 post valve closed
12/13/2010	5:31:24 PM	Main Vac valve closed
12/13/2010	5:31:24 PM	Bypass valve closed
12/13/2010	5:31:24 PM	Bubbler valve closed
12/13/2010	5:31:24 PM	H2 valve opened
12/13/2010	5:31:24 PM	Helium MFC set to  0.000000
12/13/2010	5:31:24 PM	H2 MFC set to  500.000000
12/13/2010	5:31:24 PM	BCl3 MFC set to  0.000000
12/13/2010	5:31:24 PM	PHl3 MFC set to  0.000000
12/13/2010	5:31:24 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:31:24 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:31:24 PM	Tube furnace set to 200
12/13/2010	5:32:41 PM	Helium valve closed
12/13/2010	5:32:41 PM	BCl3 valve closed
12/13/2010	5:32:41 PM	PH3 valve closed
12/13/2010	5:32:41 PM	SiCl4 pre valve closed
12/13/2010	5:32:41 PM	SiCl4 post valve closed
12/13/2010	5:32:41 PM	Main Vac valve closed
12/13/2010	5:32:41 PM	Bypass valve closed
12/13/2010	5:32:41 PM	H2 valve opened
12/13/2010	5:32:41 PM	Bubbler valve opened
12/13/2010	5:32:41 PM	Helium MFC set to  0.000000
12/13/2010	5:32:41 PM	H2 MFC set to  500.000000
12/13/2010	5:32:41 PM	BCl3 MFC set to  0.000000
12/13/2010	5:32:41 PM	PHl3 MFC set to  0.000000
12/13/2010	5:32:41 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:32:41 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:32:42 PM	Tube furnace set to 1001
12/13/2010	5:53:42 PM	Helium valve closed
12/13/2010	5:53:42 PM	BCl3 valve closed
12/13/2010	5:53:42 PM	PH3 valve closed
12/13/2010	5:53:42 PM	Main Vac valve closed
12/13/2010	5:53:42 PM	Bypass valve closed
12/13/2010	5:53:42 PM	H2 valve opened
12/13/2010	5:53:42 PM	SiCl4 pre valve opened
12/13/2010	5:53:42 PM	SiCl4 post valve opened
12/13/2010	5:53:42 PM	Bubbler valve opened
12/13/2010	5:53:42 PM	Helium MFC set to  0.000000
12/13/2010	5:53:42 PM	H2 MFC set to  500.000000
12/13/2010	5:53:42 PM	BCl3 MFC set to  0.000000
12/13/2010	5:53:42 PM	PHl3 MFC set to  0.000000
12/13/2010	5:53:42 PM	SiCl4 MFC set to  50.000000
12/13/2010	5:53:42 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:53:42 PM	Tube furnace set to 1000
12/13/2010	5:55:42 PM	H2 valve closed
12/13/2010	5:55:42 PM	BCl3 valve closed
12/13/2010	5:55:42 PM	PH3 valve closed
12/13/2010	5:55:42 PM	SiCl4 pre valve closed
12/13/2010	5:55:42 PM	SiCl4 post valve closed
12/13/2010	5:55:42 PM	Main Vac valve closed
12/13/2010	5:55:42 PM	Bypass valve closed
12/13/2010	5:55:42 PM	Helium valve opened
12/13/2010	5:55:42 PM	Bubbler valve opened
12/13/2010	5:55:42 PM	Helium MFC set to  500.000000
12/13/2010	5:55:42 PM	H2 MFC set to  0.000000
12/13/2010	5:55:42 PM	BCl3 MFC set to  0.000000
12/13/2010	5:55:42 PM	PHl3 MFC set to  0.000000
12/13/2010	5:55:42 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:55:42 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:55:42 PM	Tube furnace set to 0
12/13/2010	5:55:47 PM	Helium valve closed
12/13/2010	5:55:47 PM	H2 valve closed
12/13/2010	5:55:47 PM	BCl3 valve closed
12/13/2010	5:55:47 PM	PH3 valve closed
12/13/2010	5:55:47 PM	SiCl4 pre valve closed
12/13/2010	5:55:47 PM	SiCl4 post valve closed
12/13/2010	5:55:47 PM	Main Vac valve closed
12/13/2010	5:55:47 PM	Bypass valve closed
12/13/2010	5:55:47 PM	Bubbler valve closed
12/13/2010	5:55:47 PM	Helium MFC set to  0.000000
12/13/2010	5:55:47 PM	H2 MFC set to  0.000000
12/13/2010	5:55:47 PM	BCl3 MFC set to  0.000000
12/13/2010	5:55:47 PM	PHl3 MFC set to  0.000000
12/13/2010	5:55:47 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:55:47 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:55:47 PM	Tube furnace set to 0
12/13/2010	5:55:52 PM	Helium valve closed
12/13/2010	5:55:52 PM	H2 valve closed
12/13/2010	5:55:52 PM	BCl3 valve closed
12/13/2010	5:55:52 PM	PH3 valve closed
12/13/2010	5:55:52 PM	SiCl4 pre valve closed
12/13/2010	5:55:52 PM	SiCl4 post valve closed
12/13/2010	5:55:52 PM	Main Vac valve closed
12/13/2010	5:55:52 PM	Bubbler valve closed
12/13/2010	5:55:52 PM	Bypass valve opened
12/13/2010	5:55:52 PM	Helium MFC set to  0.000000
12/13/2010	5:55:52 PM	H2 MFC set to  0.000000
12/13/2010	5:55:52 PM	BCl3 MFC set to  0.000000
12/13/2010	5:55:52 PM	PHl3 MFC set to  0.000000
12/13/2010	5:55:52 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:55:52 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:55:52 PM	Tube furnace set to 0
12/13/2010	5:55:58 PM	Helium valve closed
12/13/2010	5:55:58 PM	H2 valve closed
12/13/2010	5:55:58 PM	BCl3 valve closed
12/13/2010	5:55:58 PM	PH3 valve closed
12/13/2010	5:55:58 PM	SiCl4 pre valve closed
12/13/2010	5:55:58 PM	SiCl4 post valve closed
12/13/2010	5:55:58 PM	Bubbler valve closed
12/13/2010	5:55:58 PM	Main Vac valve opened
12/13/2010	5:55:58 PM	Bypass valve opened
12/13/2010	5:55:58 PM	Helium MFC set to  0.000000
12/13/2010	5:55:58 PM	H2 MFC set to  0.000000
12/13/2010	5:55:58 PM	BCl3 MFC set to  0.000000
12/13/2010	5:55:58 PM	PHl3 MFC set to  0.000000
12/13/2010	5:55:58 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:55:58 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:55:58 PM	Tube furnace set to 0
12/13/2010	5:56:08 PM	H2 valve closed
12/13/2010	5:56:08 PM	BCl3 valve closed
12/13/2010	5:56:08 PM	PH3 valve closed
12/13/2010	5:56:08 PM	SiCl4 pre valve closed
12/13/2010	5:56:08 PM	SiCl4 post valve closed
12/13/2010	5:56:08 PM	Main Vac valve closed
12/13/2010	5:56:08 PM	Bypass valve closed
12/13/2010	5:56:08 PM	Bubbler valve closed
12/13/2010	5:56:08 PM	Helium valve opened
12/13/2010	5:56:08 PM	Helium MFC set to  500.000000
12/13/2010	5:56:08 PM	H2 MFC set to  0.000000
12/13/2010	5:56:08 PM	BCl3 MFC set to  0.000000
12/13/2010	5:56:08 PM	PHl3 MFC set to  0.000000
12/13/2010	5:56:08 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:56:08 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:56:08 PM	Tube furnace set to 0
12/13/2010	5:57:17 PM	H2 valve closed
12/13/2010	5:57:17 PM	BCl3 valve closed
12/13/2010	5:57:17 PM	PH3 valve closed
12/13/2010	5:57:17 PM	SiCl4 pre valve closed
12/13/2010	5:57:17 PM	SiCl4 post valve closed
12/13/2010	5:57:17 PM	Main Vac valve closed
12/13/2010	5:57:17 PM	Bypass valve closed
12/13/2010	5:57:17 PM	Helium valve opened
12/13/2010	5:57:17 PM	Bubbler valve opened
12/13/2010	5:57:17 PM	Helium MFC set to  500.000000
12/13/2010	5:57:17 PM	H2 MFC set to  0.000000
12/13/2010	5:57:17 PM	BCl3 MFC set to  0.000000
12/13/2010	5:57:17 PM	PHl3 MFC set to  0.000000
12/13/2010	5:57:17 PM	SiCl4 MFC set to  0.000000
12/13/2010	5:57:17 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	5:57:17 PM	Tube furnace set to 0
12/13/2010	6:17:17 PM	Helium valve closed
12/13/2010	6:17:17 PM	H2 valve closed
12/13/2010	6:17:17 PM	BCl3 valve closed
12/13/2010	6:17:17 PM	PH3 valve closed
12/13/2010	6:17:17 PM	SiCl4 pre valve closed
12/13/2010	6:17:17 PM	SiCl4 post valve closed
12/13/2010	6:17:17 PM	Main Vac valve closed
12/13/2010	6:17:17 PM	Bypass valve closed
12/13/2010	6:17:17 PM	Bubbler valve closed
12/13/2010	6:17:17 PM	Helium MFC set to  0.000000
12/13/2010	6:17:17 PM	H2 MFC set to  0.000000
12/13/2010	6:17:17 PM	BCl3 MFC set to  0.000000
12/13/2010	6:17:17 PM	PHl3 MFC set to  0.000000
12/13/2010	6:17:17 PM	SiCl4 MFC set to  0.000000
12/13/2010	6:17:17 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	6:17:17 PM	Tube furnace set to 0
12/13/2010	6:17:18 PM	Run finished at 6:17 PM
12/13/2010	6:23:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/13/2010	6:23:24 PM	Recipe started at 6:23 PM
12/13/2010	6:23:24 PM	Helium valve closed
12/13/2010	6:23:24 PM	H2 valve closed
12/13/2010	6:23:24 PM	BCl3 valve closed
12/13/2010	6:23:24 PM	PH3 valve closed
12/13/2010	6:23:24 PM	SiCl4 pre valve closed
12/13/2010	6:23:24 PM	SiCl4 post valve closed
12/13/2010	6:23:24 PM	Main Vac valve closed
12/13/2010	6:23:24 PM	Bubbler valve closed
12/13/2010	6:23:24 PM	Bypass valve opened
12/13/2010	6:23:24 PM	Helium MFC set to  0.000000
12/13/2010	6:23:24 PM	H2 MFC set to  0.000000
12/13/2010	6:23:24 PM	BCl3 MFC set to  0.000000
12/13/2010	6:23:24 PM	PHl3 MFC set to  0.000000
12/13/2010	6:23:24 PM	SiCl4 MFC set to  0.000000
12/13/2010	6:23:24 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	6:23:24 PM	Tube furnace set to 0
12/13/2010	6:24:17 PM	Helium valve closed
12/13/2010	6:24:17 PM	H2 valve closed
12/13/2010	6:24:17 PM	BCl3 valve closed
12/13/2010	6:24:17 PM	PH3 valve closed
12/13/2010	6:24:17 PM	SiCl4 pre valve closed
12/13/2010	6:24:17 PM	SiCl4 post valve closed
12/13/2010	6:24:17 PM	Bubbler valve closed
12/13/2010	6:24:17 PM	Main Vac valve opened
12/13/2010	6:24:17 PM	Bypass valve opened
12/13/2010	6:24:17 PM	Helium MFC set to  0.000000
12/13/2010	6:24:17 PM	H2 MFC set to  0.000000
12/13/2010	6:24:17 PM	BCl3 MFC set to  0.000000
12/13/2010	6:24:17 PM	PHl3 MFC set to  0.000000
12/13/2010	6:24:17 PM	SiCl4 MFC set to  0.000000
12/13/2010	6:24:17 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	6:24:17 PM	Tube furnace set to 0
12/13/2010	6:24:17 PM	Run finished at 6:24 PM
12/13/2010	6:24:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/13/2010	9:11:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/13/2010	9:11:02 PM	Recipe started at 9:11 PM
12/13/2010	9:11:02 PM	H2 valve closed
12/13/2010	9:11:02 PM	BCl3 valve closed
12/13/2010	9:11:02 PM	PH3 valve closed
12/13/2010	9:11:02 PM	SiCl4 pre valve closed
12/13/2010	9:11:02 PM	SiCl4 post valve closed
12/13/2010	9:11:02 PM	Main Vac valve closed
12/13/2010	9:11:02 PM	Bypass valve closed
12/13/2010	9:11:02 PM	Bubbler valve closed
12/13/2010	9:11:02 PM	Helium valve opened
12/13/2010	9:11:02 PM	Helium MFC set to  500.000000
12/13/2010	9:11:02 PM	H2 MFC set to  0.000000
12/13/2010	9:11:02 PM	BCl3 MFC set to  0.000000
12/13/2010	9:11:02 PM	PHl3 MFC set to  0.000000
12/13/2010	9:11:02 PM	SiCl4 MFC set to  0.000000
12/13/2010	9:11:02 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	9:11:03 PM	Tube furnace set to 0
12/13/2010	9:12:23 PM	Helium valve closed
12/13/2010	9:12:23 PM	H2 valve closed
12/13/2010	9:12:23 PM	BCl3 valve closed
12/13/2010	9:12:23 PM	PH3 valve closed
12/13/2010	9:12:23 PM	SiCl4 pre valve closed
12/13/2010	9:12:23 PM	SiCl4 post valve closed
12/13/2010	9:12:23 PM	Main Vac valve closed
12/13/2010	9:12:23 PM	Bypass valve closed
12/13/2010	9:12:23 PM	Bubbler valve closed
12/13/2010	9:12:23 PM	Helium MFC set to  0.000000
12/13/2010	9:12:23 PM	H2 MFC set to  0.000000
12/13/2010	9:12:23 PM	BCl3 MFC set to  0.000000
12/13/2010	9:12:23 PM	PHl3 MFC set to  0.000000
12/13/2010	9:12:23 PM	SiCl4 MFC set to  0.000000
12/13/2010	9:12:23 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	9:12:23 PM	Tube furnace set to 0
12/13/2010	9:12:23 PM	Run finished at 9:12 PM
12/13/2010	9:12:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/13/2010	9:14:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/13/2010	9:14:17 PM	Recipe started at 9:14 PM
12/13/2010	9:14:17 PM	Helium valve closed
12/13/2010	9:14:17 PM	H2 valve closed
12/13/2010	9:14:17 PM	BCl3 valve closed
12/13/2010	9:14:17 PM	PH3 valve closed
12/13/2010	9:14:17 PM	SiCl4 pre valve closed
12/13/2010	9:14:17 PM	SiCl4 post valve closed
12/13/2010	9:14:17 PM	Main Vac valve closed
12/13/2010	9:14:17 PM	Bubbler valve closed
12/13/2010	9:14:17 PM	Bypass valve opened
12/13/2010	9:14:17 PM	Helium MFC set to  0.000000
12/13/2010	9:14:17 PM	H2 MFC set to  0.000000
12/13/2010	9:14:17 PM	BCl3 MFC set to  0.000000
12/13/2010	9:14:17 PM	PHl3 MFC set to  0.000000
12/13/2010	9:14:17 PM	SiCl4 MFC set to  0.000000
12/13/2010	9:14:17 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	9:14:17 PM	Tube furnace set to 0
12/13/2010	9:14:35 PM	Run aborted at 9:14 PM
12/13/2010	9:14:35 PM	Helium valve closed
12/13/2010	9:14:35 PM	H2 valve closed
12/13/2010	9:14:35 PM	BCl3 valve closed
12/13/2010	9:14:35 PM	PH3 valve closed
12/13/2010	9:14:35 PM	SiCl4 pre valve closed
12/13/2010	9:14:35 PM	SiCl4 post valve closed
12/13/2010	9:14:35 PM	Bypass valve closed
12/13/2010	9:14:35 PM	Main Vac valve closed
12/13/2010	9:14:35 PM	Bubbler valve closed
12/13/2010	9:14:35 PM	Helium MFC set to  0.000000
12/13/2010	9:14:35 PM	H2 MFC set to  0.000000
12/13/2010	9:14:35 PM	BCl3 MFC set to  0.000000
12/13/2010	9:14:35 PM	PHl3 MFC set to  0.000000
12/13/2010	9:14:35 PM	SiCl4 MFC set to  0.000000
12/13/2010	9:14:35 PM	Tube furnace set to 0
12/13/2010	9:14:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/13/2010	9:16:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/13/2010	9:17:00 PM	Recipe started at 9:17 PM
12/13/2010	9:17:00 PM	Helium valve closed
12/13/2010	9:17:00 PM	H2 valve closed
12/13/2010	9:17:00 PM	BCl3 valve closed
12/13/2010	9:17:00 PM	PH3 valve closed
12/13/2010	9:17:00 PM	SiCl4 pre valve closed
12/13/2010	9:17:00 PM	SiCl4 post valve closed
12/13/2010	9:17:00 PM	Main Vac valve closed
12/13/2010	9:17:00 PM	Bubbler valve closed
12/13/2010	9:17:00 PM	Bypass valve opened
12/13/2010	9:17:00 PM	Helium MFC set to  0.000000
12/13/2010	9:17:00 PM	H2 MFC set to  0.000000
12/13/2010	9:17:00 PM	BCl3 MFC set to  0.000000
12/13/2010	9:17:00 PM	PHl3 MFC set to  0.000000
12/13/2010	9:17:00 PM	SiCl4 MFC set to  0.000000
12/13/2010	9:17:00 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	9:17:00 PM	Tube furnace set to 0
12/13/2010	9:17:37 PM	Helium valve closed
12/13/2010	9:17:37 PM	H2 valve closed
12/13/2010	9:17:37 PM	BCl3 valve closed
12/13/2010	9:17:37 PM	PH3 valve closed
12/13/2010	9:17:37 PM	SiCl4 pre valve closed
12/13/2010	9:17:37 PM	SiCl4 post valve closed
12/13/2010	9:17:37 PM	Bubbler valve closed
12/13/2010	9:17:37 PM	Main Vac valve opened
12/13/2010	9:17:37 PM	Bypass valve opened
12/13/2010	9:17:37 PM	Helium MFC set to  0.000000
12/13/2010	9:17:37 PM	H2 MFC set to  0.000000
12/13/2010	9:17:37 PM	BCl3 MFC set to  0.000000
12/13/2010	9:17:37 PM	PHl3 MFC set to  0.000000
12/13/2010	9:17:37 PM	SiCl4 MFC set to  0.000000
12/13/2010	9:17:37 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	9:17:37 PM	Tube furnace set to 0
12/13/2010	9:17:38 PM	Run finished at 9:17 PM
12/13/2010	9:17:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/13/2010	9:17:51 PM	Tube furnace set to 100
12/13/2010	9:18:28 PM	Helium MFC set to  100.000000
12/13/2010	9:18:30 PM	Helium valve opened
12/13/2010	9:20:22 PM	Helium MFC set to  0.000000
12/13/2010	9:20:23 PM	Helium valve closed
12/13/2010	9:21:05 PM	Helium MFC set to  50.000000
12/13/2010	9:21:06 PM	Helium valve opened
12/13/2010	9:24:45 PM	Helium MFC set to  0.000000
12/13/2010	9:24:45 PM	Helium valve closed
12/13/2010	9:30:25 PM	Helium MFC set to  100.000000
12/13/2010	9:30:26 PM	Helium valve opened
12/13/2010	9:32:19 PM	Helium MFC set to  0.000000
12/13/2010	9:32:20 PM	Helium valve closed
12/13/2010	9:33:14 PM	Main Vac valve closed
12/13/2010	9:33:16 PM	Bypass valve closed
12/13/2010	9:33:24 PM	Bypass valve opened
12/13/2010	9:33:27 PM	Main Vac valve opened
12/13/2010	9:34:06 PM	Tube furnace set to 150
12/13/2010	9:35:51 PM	Recipe started at 9:35 PM
12/13/2010	9:35:51 PM	Helium valve closed
12/13/2010	9:35:51 PM	BCl3 valve closed
12/13/2010	9:35:51 PM	PH3 valve closed
12/13/2010	9:35:51 PM	SiCl4 pre valve closed
12/13/2010	9:35:51 PM	SiCl4 post valve closed
12/13/2010	9:35:51 PM	Main Vac valve closed
12/13/2010	9:35:51 PM	Bypass valve closed
12/13/2010	9:35:51 PM	Bubbler valve closed
12/13/2010	9:35:51 PM	H2 valve opened
12/13/2010	9:35:51 PM	Helium MFC set to  0.000000
12/13/2010	9:35:51 PM	H2 MFC set to  500.000000
12/13/2010	9:35:51 PM	BCl3 MFC set to  0.000000
12/13/2010	9:35:51 PM	PHl3 MFC set to  0.000000
12/13/2010	9:35:51 PM	SiCl4 MFC set to  0.000000
12/13/2010	9:35:51 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	9:35:51 PM	Tube furnace set to 200
12/13/2010	9:37:09 PM	Helium valve closed
12/13/2010	9:37:09 PM	BCl3 valve closed
12/13/2010	9:37:09 PM	PH3 valve closed
12/13/2010	9:37:09 PM	SiCl4 pre valve closed
12/13/2010	9:37:09 PM	SiCl4 post valve closed
12/13/2010	9:37:09 PM	Main Vac valve closed
12/13/2010	9:37:09 PM	Bypass valve closed
12/13/2010	9:37:09 PM	H2 valve opened
12/13/2010	9:37:09 PM	Bubbler valve opened
12/13/2010	9:37:09 PM	Helium MFC set to  0.000000
12/13/2010	9:37:09 PM	H2 MFC set to  500.000000
12/13/2010	9:37:09 PM	BCl3 MFC set to  0.000000
12/13/2010	9:37:09 PM	PHl3 MFC set to  0.000000
12/13/2010	9:37:09 PM	SiCl4 MFC set to  0.000000
12/13/2010	9:37:09 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	9:37:10 PM	Tube furnace set to 1001
12/13/2010	9:58:09 PM	Helium valve closed
12/13/2010	9:58:09 PM	BCl3 valve closed
12/13/2010	9:58:09 PM	PH3 valve closed
12/13/2010	9:58:09 PM	Main Vac valve closed
12/13/2010	9:58:09 PM	Bypass valve closed
12/13/2010	9:58:10 PM	H2 valve opened
12/13/2010	9:58:10 PM	SiCl4 pre valve opened
12/13/2010	9:58:10 PM	SiCl4 post valve opened
12/13/2010	9:58:10 PM	Bubbler valve opened
12/13/2010	9:58:10 PM	Helium MFC set to  0.000000
12/13/2010	9:58:10 PM	H2 MFC set to  500.000000
12/13/2010	9:58:10 PM	BCl3 MFC set to  0.000000
12/13/2010	9:58:10 PM	PHl3 MFC set to  0.000000
12/13/2010	9:58:10 PM	SiCl4 MFC set to  50.000000
12/13/2010	9:58:10 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	9:58:10 PM	Tube furnace set to 1000
12/13/2010	10:13:10 PM	H2 valve closed
12/13/2010	10:13:10 PM	BCl3 valve closed
12/13/2010	10:13:10 PM	PH3 valve closed
12/13/2010	10:13:10 PM	SiCl4 pre valve closed
12/13/2010	10:13:10 PM	SiCl4 post valve closed
12/13/2010	10:13:10 PM	Main Vac valve closed
12/13/2010	10:13:10 PM	Bypass valve closed
12/13/2010	10:13:10 PM	Helium valve opened
12/13/2010	10:13:10 PM	Bubbler valve opened
12/13/2010	10:13:10 PM	Helium MFC set to  500.000000
12/13/2010	10:13:10 PM	H2 MFC set to  0.000000
12/13/2010	10:13:10 PM	BCl3 MFC set to  0.000000
12/13/2010	10:13:10 PM	PHl3 MFC set to  0.000000
12/13/2010	10:13:10 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:13:10 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:13:10 PM	Tube furnace set to 0
12/13/2010	10:13:15 PM	Helium valve closed
12/13/2010	10:13:15 PM	H2 valve closed
12/13/2010	10:13:15 PM	BCl3 valve closed
12/13/2010	10:13:15 PM	PH3 valve closed
12/13/2010	10:13:15 PM	SiCl4 pre valve closed
12/13/2010	10:13:15 PM	SiCl4 post valve closed
12/13/2010	10:13:15 PM	Main Vac valve closed
12/13/2010	10:13:15 PM	Bypass valve closed
12/13/2010	10:13:15 PM	Bubbler valve closed
12/13/2010	10:13:15 PM	Helium MFC set to  0.000000
12/13/2010	10:13:15 PM	H2 MFC set to  0.000000
12/13/2010	10:13:15 PM	BCl3 MFC set to  0.000000
12/13/2010	10:13:15 PM	PHl3 MFC set to  0.000000
12/13/2010	10:13:15 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:13:15 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:13:15 PM	Tube furnace set to 0
12/13/2010	10:13:20 PM	Helium valve closed
12/13/2010	10:13:20 PM	H2 valve closed
12/13/2010	10:13:20 PM	BCl3 valve closed
12/13/2010	10:13:20 PM	PH3 valve closed
12/13/2010	10:13:20 PM	SiCl4 pre valve closed
12/13/2010	10:13:20 PM	SiCl4 post valve closed
12/13/2010	10:13:20 PM	Main Vac valve closed
12/13/2010	10:13:20 PM	Bubbler valve closed
12/13/2010	10:13:20 PM	Bypass valve opened
12/13/2010	10:13:20 PM	Helium MFC set to  0.000000
12/13/2010	10:13:20 PM	H2 MFC set to  0.000000
12/13/2010	10:13:20 PM	BCl3 MFC set to  0.000000
12/13/2010	10:13:20 PM	PHl3 MFC set to  0.000000
12/13/2010	10:13:20 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:13:20 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:13:20 PM	Tube furnace set to 0
12/13/2010	10:13:26 PM	Helium valve closed
12/13/2010	10:13:26 PM	H2 valve closed
12/13/2010	10:13:26 PM	BCl3 valve closed
12/13/2010	10:13:26 PM	PH3 valve closed
12/13/2010	10:13:26 PM	SiCl4 pre valve closed
12/13/2010	10:13:26 PM	SiCl4 post valve closed
12/13/2010	10:13:26 PM	Bubbler valve closed
12/13/2010	10:13:26 PM	Main Vac valve opened
12/13/2010	10:13:26 PM	Bypass valve opened
12/13/2010	10:13:26 PM	Helium MFC set to  0.000000
12/13/2010	10:13:26 PM	H2 MFC set to  0.000000
12/13/2010	10:13:26 PM	BCl3 MFC set to  0.000000
12/13/2010	10:13:26 PM	PHl3 MFC set to  0.000000
12/13/2010	10:13:26 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:13:26 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:13:26 PM	Tube furnace set to 0
12/13/2010	10:13:36 PM	H2 valve closed
12/13/2010	10:13:36 PM	BCl3 valve closed
12/13/2010	10:13:36 PM	PH3 valve closed
12/13/2010	10:13:36 PM	SiCl4 pre valve closed
12/13/2010	10:13:36 PM	SiCl4 post valve closed
12/13/2010	10:13:36 PM	Main Vac valve closed
12/13/2010	10:13:36 PM	Bypass valve closed
12/13/2010	10:13:36 PM	Bubbler valve closed
12/13/2010	10:13:36 PM	Helium valve opened
12/13/2010	10:13:36 PM	Helium MFC set to  500.000000
12/13/2010	10:13:36 PM	H2 MFC set to  0.000000
12/13/2010	10:13:36 PM	BCl3 MFC set to  0.000000
12/13/2010	10:13:36 PM	PHl3 MFC set to  0.000000
12/13/2010	10:13:36 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:13:36 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:13:36 PM	Tube furnace set to 0
12/13/2010	10:14:45 PM	H2 valve closed
12/13/2010	10:14:45 PM	BCl3 valve closed
12/13/2010	10:14:45 PM	PH3 valve closed
12/13/2010	10:14:45 PM	SiCl4 pre valve closed
12/13/2010	10:14:45 PM	SiCl4 post valve closed
12/13/2010	10:14:45 PM	Main Vac valve closed
12/13/2010	10:14:45 PM	Bypass valve closed
12/13/2010	10:14:45 PM	Helium valve opened
12/13/2010	10:14:45 PM	Bubbler valve opened
12/13/2010	10:14:45 PM	Helium MFC set to  500.000000
12/13/2010	10:14:45 PM	H2 MFC set to  0.000000
12/13/2010	10:14:45 PM	BCl3 MFC set to  0.000000
12/13/2010	10:14:45 PM	PHl3 MFC set to  0.000000
12/13/2010	10:14:45 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:14:45 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:14:45 PM	Tube furnace set to 0
12/13/2010	10:34:45 PM	Helium valve closed
12/13/2010	10:34:45 PM	H2 valve closed
12/13/2010	10:34:45 PM	BCl3 valve closed
12/13/2010	10:34:45 PM	PH3 valve closed
12/13/2010	10:34:45 PM	SiCl4 pre valve closed
12/13/2010	10:34:45 PM	SiCl4 post valve closed
12/13/2010	10:34:45 PM	Main Vac valve closed
12/13/2010	10:34:45 PM	Bypass valve closed
12/13/2010	10:34:45 PM	Bubbler valve closed
12/13/2010	10:34:45 PM	Helium MFC set to  0.000000
12/13/2010	10:34:45 PM	H2 MFC set to  0.000000
12/13/2010	10:34:45 PM	BCl3 MFC set to  0.000000
12/13/2010	10:34:45 PM	PHl3 MFC set to  0.000000
12/13/2010	10:34:45 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:34:45 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:34:46 PM	Tube furnace set to 0
12/13/2010	10:34:46 PM	Run finished at 10:34 PM
12/13/2010	10:38:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/13/2010	10:38:37 PM	Recipe started at 10:38 PM
12/13/2010	10:38:37 PM	Helium valve closed
12/13/2010	10:38:37 PM	H2 valve closed
12/13/2010	10:38:37 PM	BCl3 valve closed
12/13/2010	10:38:37 PM	PH3 valve closed
12/13/2010	10:38:37 PM	SiCl4 pre valve closed
12/13/2010	10:38:37 PM	SiCl4 post valve closed
12/13/2010	10:38:37 PM	Main Vac valve closed
12/13/2010	10:38:37 PM	Bubbler valve closed
12/13/2010	10:38:37 PM	Bypass valve opened
12/13/2010	10:38:37 PM	Helium MFC set to  0.000000
12/13/2010	10:38:37 PM	H2 MFC set to  0.000000
12/13/2010	10:38:37 PM	BCl3 MFC set to  0.000000
12/13/2010	10:38:37 PM	PHl3 MFC set to  0.000000
12/13/2010	10:38:37 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:38:37 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:38:38 PM	Tube furnace set to 0
12/13/2010	10:39:29 PM	Helium valve closed
12/13/2010	10:39:29 PM	H2 valve closed
12/13/2010	10:39:29 PM	BCl3 valve closed
12/13/2010	10:39:29 PM	PH3 valve closed
12/13/2010	10:39:29 PM	SiCl4 pre valve closed
12/13/2010	10:39:29 PM	SiCl4 post valve closed
12/13/2010	10:39:29 PM	Bubbler valve closed
12/13/2010	10:39:29 PM	Main Vac valve opened
12/13/2010	10:39:29 PM	Bypass valve opened
12/13/2010	10:39:29 PM	Helium MFC set to  0.000000
12/13/2010	10:39:29 PM	H2 MFC set to  0.000000
12/13/2010	10:39:29 PM	BCl3 MFC set to  0.000000
12/13/2010	10:39:29 PM	PHl3 MFC set to  0.000000
12/13/2010	10:39:29 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:39:29 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:39:29 PM	Tube furnace set to 0
12/13/2010	10:40:29 PM	H2 valve closed
12/13/2010	10:40:29 PM	BCl3 valve closed
12/13/2010	10:40:29 PM	PH3 valve closed
12/13/2010	10:40:29 PM	SiCl4 pre valve closed
12/13/2010	10:40:29 PM	SiCl4 post valve closed
12/13/2010	10:40:29 PM	Bubbler valve closed
12/13/2010	10:40:29 PM	Helium valve opened
12/13/2010	10:40:29 PM	Main Vac valve opened
12/13/2010	10:40:29 PM	Bypass valve opened
12/13/2010	10:40:29 PM	Helium MFC set to  100.000000
12/13/2010	10:40:29 PM	H2 MFC set to  0.000000
12/13/2010	10:40:29 PM	BCl3 MFC set to  0.000000
12/13/2010	10:40:29 PM	PHl3 MFC set to  0.000000
12/13/2010	10:40:29 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:40:29 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:40:29 PM	Tube furnace set to 0
12/13/2010	10:41:29 PM	Helium valve closed
12/13/2010	10:41:29 PM	H2 valve closed
12/13/2010	10:41:29 PM	BCl3 valve closed
12/13/2010	10:41:29 PM	PH3 valve closed
12/13/2010	10:41:29 PM	SiCl4 pre valve closed
12/13/2010	10:41:29 PM	SiCl4 post valve closed
12/13/2010	10:41:29 PM	Bubbler valve closed
12/13/2010	10:41:29 PM	Main Vac valve opened
12/13/2010	10:41:29 PM	Bypass valve opened
12/13/2010	10:41:29 PM	Helium MFC set to  0.000000
12/13/2010	10:41:29 PM	H2 MFC set to  0.000000
12/13/2010	10:41:29 PM	BCl3 MFC set to  0.000000
12/13/2010	10:41:29 PM	PHl3 MFC set to  0.000000
12/13/2010	10:41:29 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:41:29 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:41:29 PM	Tube furnace set to 0
12/13/2010	10:42:29 PM	H2 valve closed
12/13/2010	10:42:29 PM	BCl3 valve closed
12/13/2010	10:42:29 PM	PH3 valve closed
12/13/2010	10:42:29 PM	SiCl4 pre valve closed
12/13/2010	10:42:29 PM	SiCl4 post valve closed
12/13/2010	10:42:29 PM	Bubbler valve closed
12/13/2010	10:42:29 PM	Helium valve opened
12/13/2010	10:42:29 PM	Main Vac valve opened
12/13/2010	10:42:29 PM	Bypass valve opened
12/13/2010	10:42:29 PM	Helium MFC set to  100.000000
12/13/2010	10:42:29 PM	H2 MFC set to  0.000000
12/13/2010	10:42:29 PM	BCl3 MFC set to  0.000000
12/13/2010	10:42:29 PM	PHl3 MFC set to  0.000000
12/13/2010	10:42:29 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:42:29 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:42:29 PM	Tube furnace set to 0
12/13/2010	10:43:29 PM	Helium valve closed
12/13/2010	10:43:29 PM	H2 valve closed
12/13/2010	10:43:29 PM	BCl3 valve closed
12/13/2010	10:43:29 PM	PH3 valve closed
12/13/2010	10:43:29 PM	SiCl4 pre valve closed
12/13/2010	10:43:29 PM	SiCl4 post valve closed
12/13/2010	10:43:29 PM	Bubbler valve closed
12/13/2010	10:43:29 PM	Main Vac valve opened
12/13/2010	10:43:29 PM	Bypass valve opened
12/13/2010	10:43:29 PM	Helium MFC set to  0.000000
12/13/2010	10:43:29 PM	H2 MFC set to  0.000000
12/13/2010	10:43:29 PM	BCl3 MFC set to  0.000000
12/13/2010	10:43:29 PM	PHl3 MFC set to  0.000000
12/13/2010	10:43:30 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:43:30 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:43:30 PM	Tube furnace set to 0
12/13/2010	10:44:30 PM	H2 valve closed
12/13/2010	10:44:30 PM	BCl3 valve closed
12/13/2010	10:44:30 PM	PH3 valve closed
12/13/2010	10:44:30 PM	SiCl4 pre valve closed
12/13/2010	10:44:30 PM	SiCl4 post valve closed
12/13/2010	10:44:30 PM	Bubbler valve closed
12/13/2010	10:44:30 PM	Helium valve opened
12/13/2010	10:44:30 PM	Main Vac valve opened
12/13/2010	10:44:30 PM	Bypass valve opened
12/13/2010	10:44:30 PM	Helium MFC set to  100.000000
12/13/2010	10:44:30 PM	H2 MFC set to  0.000000
12/13/2010	10:44:30 PM	BCl3 MFC set to  0.000000
12/13/2010	10:44:30 PM	PHl3 MFC set to  0.000000
12/13/2010	10:44:30 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:44:30 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:44:30 PM	Tube furnace set to 0
12/13/2010	10:45:30 PM	Helium valve closed
12/13/2010	10:45:30 PM	H2 valve closed
12/13/2010	10:45:30 PM	BCl3 valve closed
12/13/2010	10:45:30 PM	PH3 valve closed
12/13/2010	10:45:30 PM	SiCl4 pre valve closed
12/13/2010	10:45:30 PM	SiCl4 post valve closed
12/13/2010	10:45:30 PM	Bubbler valve closed
12/13/2010	10:45:30 PM	Main Vac valve opened
12/13/2010	10:45:30 PM	Bypass valve opened
12/13/2010	10:45:30 PM	Helium MFC set to  0.000000
12/13/2010	10:45:30 PM	H2 MFC set to  0.000000
12/13/2010	10:45:30 PM	BCl3 MFC set to  0.000000
12/13/2010	10:45:30 PM	PHl3 MFC set to  0.000000
12/13/2010	10:45:30 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:45:30 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:45:30 PM	Tube furnace set to 0
12/13/2010	10:46:30 PM	H2 valve closed
12/13/2010	10:46:30 PM	BCl3 valve closed
12/13/2010	10:46:30 PM	PH3 valve closed
12/13/2010	10:46:30 PM	SiCl4 pre valve closed
12/13/2010	10:46:30 PM	SiCl4 post valve closed
12/13/2010	10:46:30 PM	Bubbler valve closed
12/13/2010	10:46:30 PM	Helium valve opened
12/13/2010	10:46:30 PM	Main Vac valve opened
12/13/2010	10:46:30 PM	Bypass valve opened
12/13/2010	10:46:30 PM	Helium MFC set to  100.000000
12/13/2010	10:46:30 PM	H2 MFC set to  0.000000
12/13/2010	10:46:30 PM	BCl3 MFC set to  0.000000
12/13/2010	10:46:30 PM	PHl3 MFC set to  0.000000
12/13/2010	10:46:30 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:46:30 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:46:30 PM	Tube furnace set to 0
12/13/2010	10:47:30 PM	Helium valve closed
12/13/2010	10:47:30 PM	H2 valve closed
12/13/2010	10:47:30 PM	BCl3 valve closed
12/13/2010	10:47:30 PM	PH3 valve closed
12/13/2010	10:47:30 PM	SiCl4 pre valve closed
12/13/2010	10:47:30 PM	SiCl4 post valve closed
12/13/2010	10:47:30 PM	Bubbler valve closed
12/13/2010	10:47:30 PM	Main Vac valve opened
12/13/2010	10:47:30 PM	Bypass valve opened
12/13/2010	10:47:30 PM	Helium MFC set to  0.000000
12/13/2010	10:47:30 PM	H2 MFC set to  0.000000
12/13/2010	10:47:30 PM	BCl3 MFC set to  0.000000
12/13/2010	10:47:30 PM	PHl3 MFC set to  0.000000
12/13/2010	10:47:30 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:47:30 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:47:30 PM	Tube furnace set to 0
12/13/2010	10:48:30 PM	H2 valve closed
12/13/2010	10:48:30 PM	BCl3 valve closed
12/13/2010	10:48:30 PM	PH3 valve closed
12/13/2010	10:48:30 PM	SiCl4 pre valve closed
12/13/2010	10:48:30 PM	SiCl4 post valve closed
12/13/2010	10:48:30 PM	Bubbler valve closed
12/13/2010	10:48:30 PM	Helium valve opened
12/13/2010	10:48:30 PM	Main Vac valve opened
12/13/2010	10:48:30 PM	Bypass valve opened
12/13/2010	10:48:30 PM	Helium MFC set to  100.000000
12/13/2010	10:48:30 PM	H2 MFC set to  0.000000
12/13/2010	10:48:30 PM	BCl3 MFC set to  0.000000
12/13/2010	10:48:30 PM	PHl3 MFC set to  0.000000
12/13/2010	10:48:30 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:48:30 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:48:31 PM	Tube furnace set to 0
12/13/2010	10:49:31 PM	Helium valve closed
12/13/2010	10:49:31 PM	H2 valve closed
12/13/2010	10:49:31 PM	BCl3 valve closed
12/13/2010	10:49:31 PM	PH3 valve closed
12/13/2010	10:49:31 PM	SiCl4 pre valve closed
12/13/2010	10:49:31 PM	SiCl4 post valve closed
12/13/2010	10:49:31 PM	Bubbler valve closed
12/13/2010	10:49:31 PM	Main Vac valve opened
12/13/2010	10:49:31 PM	Bypass valve opened
12/13/2010	10:49:31 PM	Helium MFC set to  0.000000
12/13/2010	10:49:31 PM	H2 MFC set to  0.000000
12/13/2010	10:49:31 PM	BCl3 MFC set to  0.000000
12/13/2010	10:49:31 PM	PHl3 MFC set to  0.000000
12/13/2010	10:49:31 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:49:31 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:49:31 PM	Tube furnace set to 0
12/13/2010	10:50:31 PM	H2 valve closed
12/13/2010	10:50:31 PM	BCl3 valve closed
12/13/2010	10:50:31 PM	PH3 valve closed
12/13/2010	10:50:31 PM	SiCl4 pre valve closed
12/13/2010	10:50:31 PM	SiCl4 post valve closed
12/13/2010	10:50:31 PM	Bubbler valve closed
12/13/2010	10:50:31 PM	Helium valve opened
12/13/2010	10:50:31 PM	Main Vac valve opened
12/13/2010	10:50:31 PM	Bypass valve opened
12/13/2010	10:50:31 PM	Helium MFC set to  100.000000
12/13/2010	10:50:31 PM	H2 MFC set to  0.000000
12/13/2010	10:50:31 PM	BCl3 MFC set to  0.000000
12/13/2010	10:50:31 PM	PHl3 MFC set to  0.000000
12/13/2010	10:50:31 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:50:31 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:50:31 PM	Tube furnace set to 0
12/13/2010	10:51:31 PM	Helium valve closed
12/13/2010	10:51:31 PM	H2 valve closed
12/13/2010	10:51:31 PM	BCl3 valve closed
12/13/2010	10:51:31 PM	PH3 valve closed
12/13/2010	10:51:31 PM	SiCl4 pre valve closed
12/13/2010	10:51:31 PM	SiCl4 post valve closed
12/13/2010	10:51:31 PM	Bubbler valve closed
12/13/2010	10:51:31 PM	Main Vac valve opened
12/13/2010	10:51:31 PM	Bypass valve opened
12/13/2010	10:51:31 PM	Helium MFC set to  0.000000
12/13/2010	10:51:31 PM	H2 MFC set to  0.000000
12/13/2010	10:51:31 PM	BCl3 MFC set to  0.000000
12/13/2010	10:51:31 PM	PHl3 MFC set to  0.000000
12/13/2010	10:51:31 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:51:31 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:51:31 PM	Tube furnace set to 0
12/13/2010	10:52:31 PM	H2 valve closed
12/13/2010	10:52:31 PM	BCl3 valve closed
12/13/2010	10:52:31 PM	PH3 valve closed
12/13/2010	10:52:31 PM	SiCl4 pre valve closed
12/13/2010	10:52:31 PM	SiCl4 post valve closed
12/13/2010	10:52:31 PM	Bubbler valve closed
12/13/2010	10:52:31 PM	Helium valve opened
12/13/2010	10:52:31 PM	Main Vac valve opened
12/13/2010	10:52:31 PM	Bypass valve opened
12/13/2010	10:52:31 PM	Helium MFC set to  100.000000
12/13/2010	10:52:31 PM	H2 MFC set to  0.000000
12/13/2010	10:52:31 PM	BCl3 MFC set to  0.000000
12/13/2010	10:52:31 PM	PHl3 MFC set to  0.000000
12/13/2010	10:52:31 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:52:31 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:52:31 PM	Tube furnace set to 0
12/13/2010	10:53:31 PM	Helium valve closed
12/13/2010	10:53:31 PM	H2 valve closed
12/13/2010	10:53:31 PM	BCl3 valve closed
12/13/2010	10:53:31 PM	PH3 valve closed
12/13/2010	10:53:31 PM	SiCl4 pre valve closed
12/13/2010	10:53:31 PM	SiCl4 post valve closed
12/13/2010	10:53:31 PM	Bubbler valve closed
12/13/2010	10:53:31 PM	Main Vac valve opened
12/13/2010	10:53:31 PM	Bypass valve opened
12/13/2010	10:53:31 PM	Helium MFC set to  0.000000
12/13/2010	10:53:31 PM	H2 MFC set to  0.000000
12/13/2010	10:53:31 PM	BCl3 MFC set to  0.000000
12/13/2010	10:53:31 PM	PHl3 MFC set to  0.000000
12/13/2010	10:53:31 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:53:31 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:53:32 PM	Tube furnace set to 0
12/13/2010	10:54:32 PM	H2 valve closed
12/13/2010	10:54:32 PM	BCl3 valve closed
12/13/2010	10:54:32 PM	PH3 valve closed
12/13/2010	10:54:32 PM	SiCl4 pre valve closed
12/13/2010	10:54:32 PM	SiCl4 post valve closed
12/13/2010	10:54:32 PM	Bubbler valve closed
12/13/2010	10:54:32 PM	Helium valve opened
12/13/2010	10:54:32 PM	Main Vac valve opened
12/13/2010	10:54:32 PM	Bypass valve opened
12/13/2010	10:54:32 PM	Helium MFC set to  100.000000
12/13/2010	10:54:32 PM	H2 MFC set to  0.000000
12/13/2010	10:54:32 PM	BCl3 MFC set to  0.000000
12/13/2010	10:54:32 PM	PHl3 MFC set to  0.000000
12/13/2010	10:54:32 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:54:32 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:54:32 PM	Tube furnace set to 0
12/13/2010	10:55:32 PM	Helium valve closed
12/13/2010	10:55:32 PM	H2 valve closed
12/13/2010	10:55:32 PM	BCl3 valve closed
12/13/2010	10:55:32 PM	PH3 valve closed
12/13/2010	10:55:32 PM	SiCl4 pre valve closed
12/13/2010	10:55:32 PM	SiCl4 post valve closed
12/13/2010	10:55:32 PM	Bubbler valve closed
12/13/2010	10:55:32 PM	Main Vac valve opened
12/13/2010	10:55:32 PM	Bypass valve opened
12/13/2010	10:55:32 PM	Helium MFC set to  0.000000
12/13/2010	10:55:32 PM	H2 MFC set to  0.000000
12/13/2010	10:55:32 PM	BCl3 MFC set to  0.000000
12/13/2010	10:55:32 PM	PHl3 MFC set to  0.000000
12/13/2010	10:55:32 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:55:32 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:55:32 PM	Tube furnace set to 0
12/13/2010	10:56:12 PM	H2 valve closed
12/13/2010	10:56:12 PM	BCl3 valve closed
12/13/2010	10:56:13 PM	PH3 valve closed
12/13/2010	10:56:13 PM	SiCl4 pre valve closed
12/13/2010	10:56:13 PM	SiCl4 post valve closed
12/13/2010	10:56:13 PM	Bubbler valve closed
12/13/2010	10:56:13 PM	Helium valve opened
12/13/2010	10:56:13 PM	Main Vac valve opened
12/13/2010	10:56:13 PM	Bypass valve opened
12/13/2010	10:56:13 PM	Helium MFC set to  100.000000
12/13/2010	10:56:13 PM	H2 MFC set to  0.000000
12/13/2010	10:56:13 PM	BCl3 MFC set to  0.000000
12/13/2010	10:56:13 PM	PHl3 MFC set to  0.000000
12/13/2010	10:56:13 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:56:13 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:56:13 PM	Tube furnace set to 0
12/13/2010	10:56:13 PM	Helium valve closed
12/13/2010	10:56:13 PM	H2 valve closed
12/13/2010	10:56:13 PM	BCl3 valve closed
12/13/2010	10:56:13 PM	PH3 valve closed
12/13/2010	10:56:13 PM	SiCl4 pre valve closed
12/13/2010	10:56:13 PM	SiCl4 post valve closed
12/13/2010	10:56:13 PM	Bubbler valve closed
12/13/2010	10:56:13 PM	Main Vac valve opened
12/13/2010	10:56:13 PM	Bypass valve opened
12/13/2010	10:56:13 PM	Helium MFC set to  0.000000
12/13/2010	10:56:13 PM	H2 MFC set to  0.000000
12/13/2010	10:56:13 PM	BCl3 MFC set to  0.000000
12/13/2010	10:56:13 PM	PHl3 MFC set to  0.000000
12/13/2010	10:56:13 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:56:13 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:56:13 PM	Tube furnace set to 0
12/13/2010	10:56:14 PM	H2 valve closed
12/13/2010	10:56:14 PM	BCl3 valve closed
12/13/2010	10:56:14 PM	PH3 valve closed
12/13/2010	10:56:14 PM	SiCl4 pre valve closed
12/13/2010	10:56:14 PM	SiCl4 post valve closed
12/13/2010	10:56:14 PM	Bubbler valve closed
12/13/2010	10:56:14 PM	Helium valve opened
12/13/2010	10:56:14 PM	Main Vac valve opened
12/13/2010	10:56:14 PM	Bypass valve opened
12/13/2010	10:56:14 PM	Helium MFC set to  100.000000
12/13/2010	10:56:14 PM	H2 MFC set to  0.000000
12/13/2010	10:56:14 PM	BCl3 MFC set to  0.000000
12/13/2010	10:56:14 PM	PHl3 MFC set to  0.000000
12/13/2010	10:56:14 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:56:14 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:56:15 PM	Tube furnace set to 0
12/13/2010	10:56:15 PM	Helium valve closed
12/13/2010	10:56:15 PM	H2 valve closed
12/13/2010	10:56:15 PM	BCl3 valve closed
12/13/2010	10:56:15 PM	PH3 valve closed
12/13/2010	10:56:15 PM	SiCl4 pre valve closed
12/13/2010	10:56:15 PM	SiCl4 post valve closed
12/13/2010	10:56:15 PM	Bubbler valve closed
12/13/2010	10:56:15 PM	Main Vac valve opened
12/13/2010	10:56:15 PM	Bypass valve opened
12/13/2010	10:56:15 PM	Helium MFC set to  0.000000
12/13/2010	10:56:15 PM	H2 MFC set to  0.000000
12/13/2010	10:56:15 PM	BCl3 MFC set to  0.000000
12/13/2010	10:56:15 PM	PHl3 MFC set to  0.000000
12/13/2010	10:56:15 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:56:15 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:56:15 PM	Tube furnace set to 0
12/13/2010	10:56:16 PM	Run finished at 10:56 PM
12/13/2010	10:56:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/13/2010	10:57:32 PM	Main Vac valve closed
12/13/2010	10:57:34 PM	Bypass valve closed
12/13/2010	10:57:45 PM	Bypass valve opened
12/13/2010	10:57:47 PM	Main Vac valve opened
12/13/2010	10:58:07 PM	Recipe started at 10:58 PM
12/13/2010	10:58:07 PM	Helium valve closed
12/13/2010	10:58:07 PM	BCl3 valve closed
12/13/2010	10:58:07 PM	PH3 valve closed
12/13/2010	10:58:07 PM	SiCl4 pre valve closed
12/13/2010	10:58:07 PM	SiCl4 post valve closed
12/13/2010	10:58:07 PM	Main Vac valve closed
12/13/2010	10:58:07 PM	Bypass valve closed
12/13/2010	10:58:07 PM	Bubbler valve closed
12/13/2010	10:58:07 PM	H2 valve opened
12/13/2010	10:58:07 PM	Helium MFC set to  0.000000
12/13/2010	10:58:07 PM	H2 MFC set to  500.000000
12/13/2010	10:58:07 PM	BCl3 MFC set to  0.000000
12/13/2010	10:58:07 PM	PHl3 MFC set to  0.000000
12/13/2010	10:58:07 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:58:07 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:58:07 PM	Tube furnace set to 200
12/13/2010	10:59:26 PM	Helium valve closed
12/13/2010	10:59:26 PM	BCl3 valve closed
12/13/2010	10:59:26 PM	PH3 valve closed
12/13/2010	10:59:26 PM	SiCl4 pre valve closed
12/13/2010	10:59:26 PM	SiCl4 post valve closed
12/13/2010	10:59:26 PM	Main Vac valve closed
12/13/2010	10:59:26 PM	Bypass valve closed
12/13/2010	10:59:26 PM	H2 valve opened
12/13/2010	10:59:26 PM	Bubbler valve opened
12/13/2010	10:59:26 PM	Helium MFC set to  0.000000
12/13/2010	10:59:26 PM	H2 MFC set to  500.000000
12/13/2010	10:59:26 PM	BCl3 MFC set to  0.000000
12/13/2010	10:59:26 PM	PHl3 MFC set to  0.000000
12/13/2010	10:59:26 PM	SiCl4 MFC set to  0.000000
12/13/2010	10:59:26 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	10:59:26 PM	Tube furnace set to 1001
12/13/2010	11:20:26 PM	Helium valve closed
12/13/2010	11:20:26 PM	BCl3 valve closed
12/13/2010	11:20:26 PM	PH3 valve closed
12/13/2010	11:20:26 PM	Main Vac valve closed
12/13/2010	11:20:26 PM	Bypass valve closed
12/13/2010	11:20:26 PM	H2 valve opened
12/13/2010	11:20:26 PM	SiCl4 pre valve opened
12/13/2010	11:20:26 PM	SiCl4 post valve opened
12/13/2010	11:20:26 PM	Bubbler valve opened
12/13/2010	11:20:26 PM	Helium MFC set to  0.000000
12/13/2010	11:20:26 PM	H2 MFC set to  500.000000
12/13/2010	11:20:26 PM	BCl3 MFC set to  0.000000
12/13/2010	11:20:26 PM	PHl3 MFC set to  0.000000
12/13/2010	11:20:26 PM	SiCl4 MFC set to  50.000000
12/13/2010	11:20:26 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	11:20:26 PM	Tube furnace set to 1000
12/13/2010	11:35:26 PM	H2 valve closed
12/13/2010	11:35:26 PM	BCl3 valve closed
12/13/2010	11:35:26 PM	PH3 valve closed
12/13/2010	11:35:26 PM	SiCl4 pre valve closed
12/13/2010	11:35:26 PM	SiCl4 post valve closed
12/13/2010	11:35:26 PM	Main Vac valve closed
12/13/2010	11:35:26 PM	Bypass valve closed
12/13/2010	11:35:26 PM	Helium valve opened
12/13/2010	11:35:26 PM	Bubbler valve opened
12/13/2010	11:35:26 PM	Helium MFC set to  500.000000
12/13/2010	11:35:26 PM	H2 MFC set to  0.000000
12/13/2010	11:35:26 PM	BCl3 MFC set to  0.000000
12/13/2010	11:35:26 PM	PHl3 MFC set to  0.000000
12/13/2010	11:35:26 PM	SiCl4 MFC set to  0.000000
12/13/2010	11:35:26 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	11:35:26 PM	Tube furnace set to 0
12/13/2010	11:55:26 PM	Helium valve closed
12/13/2010	11:55:26 PM	H2 valve closed
12/13/2010	11:55:26 PM	BCl3 valve closed
12/13/2010	11:55:26 PM	PH3 valve closed
12/13/2010	11:55:26 PM	SiCl4 pre valve closed
12/13/2010	11:55:26 PM	SiCl4 post valve closed
12/13/2010	11:55:26 PM	Main Vac valve closed
12/13/2010	11:55:26 PM	Bypass valve closed
12/13/2010	11:55:26 PM	Bubbler valve closed
12/13/2010	11:55:26 PM	Helium MFC set to  0.000000
12/13/2010	11:55:26 PM	H2 MFC set to  0.000000
12/13/2010	11:55:26 PM	BCl3 MFC set to  0.000000
12/13/2010	11:55:26 PM	PHl3 MFC set to  0.000000
12/13/2010	11:55:26 PM	SiCl4 MFC set to  0.000000
12/13/2010	11:55:26 PM	Bypass solenoid MFC set to  0.000000
12/13/2010	11:55:26 PM	Tube furnace set to 0
12/13/2010	11:55:27 PM	Run finished at 11:55 PM
